Hitachi, Ltd.

Mitsuo Komatsu

Shunroku Taya

Hidemi Koike

Katsumi Tokiguchi

Noriyuki Sakudo

Susumu Ozasa

Osami Okada

Takeshi Koike

Mitsunori Komatsumoto

A plasma ion source includes a discharge chamber in which a plasma is produced by plasma generator, with an acceleration electrode being disposed adjacent to the discharge chamber in order to extract ions from the produced plasma. A deceleration electrode is disposed adjacent to the acceleration electrode to decelerate the extracted ions, and a ground electrode is disposed adjacent to the deceleration electrode. An insulator container is disposed so as to surround the discharge chamber and the respective electrodes, and a shield ring electrode of ground potential is disposed in the vicinity of the deceleration electrode and along an inner wall surface of the insulator container in order to prevent any discharge from arising across the deceleration electrode and the ground electrode.

Plasma ion source

A specimens rotating device including a cooling source located in the central portion of a rotary plate, and a plurality of specimens arranged in the peripheral portion of the rotary plate in a manner to surround the cooling source. A plurality of heat pipes are arranged between the cooling source and the specimens so that each heat pipe is secured at one end to the cooling source and at the other end to one of the specimens. Each heat pipe has a working fluid sealed therein and its one end is exposed in a cooling fluid in a channel in the cooling source. Upon rotation of the rotary plate, the specimens are rotated along with the rotary plate, and the working fluid in the heat pipes is shifted toward the specimens. The working fluid absorbs heat from the specimens and evaporates into vapor which quickly returns to the cooling source due to the difference in vapor pressure to condense into condensate by releasing the latent heat of evaporation into the cooling source which constantly receives a fresh supply of cooling fluid, to enable the heat from the specimens to be effectively released to outside.

Specimens rotating device

Growing community of inventors

Katsuta, Japan

Mitsuo Komatsu