Average Co-Inventor Count = 3.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Semiconductor Process Laboratory Co., Ltd. (3 from 33 patents)
2. Canon Sales Co., Inc. (3 from 26 patents)
3. Alcan-tech Co., Inc. (3 from 15 patents)
3 patents:
1. 5330577 - Semiconductor fabrication equipment
2. 5302209 - Apparatus for manufacturing semiconductor device
3. 5281295 - Semiconductor fabrication equipment