Alps Electric Co., Ltd.

Mitsuo Bitoh

Satoshi Waga

Kiyoshi Sasai

Kazunari Takida

Yoshihiro Sudoh

Kenji Shimizu

Yoshinobu Kakihara

A thin film device comprising a substrate which is magnetic and has insulation property at least on the surface, coils formed spirally in a planar configuration on the substrate, a first interlayer insulation film formed to a portion excepting for the terminal portion of the coils and a magnetic material connection portion of the substrate, a magnetic film and a second interlayer insulation film formed successively on the first interlayer insulation film excepting for the terminal portions, and bump electrodes formed in connection with the terminal portions in which a crystallite material having a composition: Fe.sub.78 Ta.sub.10 C.sub.12 is used as the magnetic film. The thin film device can be formed an a reduced size and having a large inductance value. When the device is used as a noise filter, a cut-off frequency range can be lowered.

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Sendai, Japan

Mitsuo Bitoh