Hitachi-high-technologies Corporation

Mitsuo Akatsu

Mitsuru Oonuma

Hiroyuki Noda

Akira Omachi

Ai Masuda

Junichi Katane

Shinichi Tomita

Shuhei Yabu

Isao Takahira

Hiroyuki Komuro

Yuuta Ebine

Tomoyasu Hirashima

Naoto Koga

In this charged particle beam device, when a sample chamber is to be placed in a high-vacuum state, a charged particle gun chamber and the sample chamber are evacuated via a main intake of a turbo molecular pump, and when the sample chamber is to be placed in a low-vacuum state, the sample chamber is evacuated via an intermediate intake of the turbo molecular pump while the charged particle gun chamber is evacuated via the main intake. An oil rotation pump for performing back pressure exhausting of the turbo molecular pump does not directly evacuate the charged particle gun chamber or the sample chamber. It is thereby possible to minimize contamination of the device interior in both high-vacuum and low-vacuum states, which makes it possible to prevent contamination of the observed sample and reduce deterioration over time in the ultimate vacuum.

Charged particle beam device and evacuation method for same

Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device () is provided with a detachable body unit () and an auxiliary unit (), the body unit () housing a functional unit related to charged particle beams, and the auxiliary unit () housing a power source unit ().

Charged particle beam device and installation method

Electron microscope

Growing community of inventors

Tokyo, Japan

Mitsuo Akatsu