Ulvac, Inc.

Ulvac Cryogenics Inc.

Mitsuki Terashima

Junpei Yuyama

Yukihito Tashiro

Kosuke Hidaka

Junichi Itoh

Hidenori Fukumoto

Shuichi Yamasaki

Taku Komuro

There is provided a holding apparatus which is capable of rotatably holding, while cooling to a cryogenic temperature, a to-be-processed object in a vacuum chamber. A holding apparatus for rotatably holding, while cooling, a to-be-processed object in a vacuum chamber Vc, has a stage on which the to-be-processed object is placed, a rotary drive device for rotatably supporting the stage, and a cooling device for cooling the stage. Provided that a stage surface side on which the to-be-processed object is placed is defined as an upside, the rotary drive device has: a tubular rotary shaft body which is mounted on a wall surface of the vacuum chamber, in a penetrating manner, through a first vacuum seal; a connection member for connecting an upper end part of the rotary shaft body and a lower surface of the stage in a manner to define a space below the stage; and a driving motor for driving to rotate the rotary shaft body.

Holding apparatus

Growing community of inventors

Kanagawa, Japan

Mitsuki Terashima