Fuji Electric Co., Ltd.

Mitsuhiro Naruse

Shoji Yokoyama

Takeshi Matsushita

Masaki Takeuchi

Masahiro Kikuchi

Hiroaki Nakahara

Masahiro Momose

Takenori Wada

Yoshio Igarashi

Takashi Kamoshida

Takashi Ouchi

A heating and cooling device including: an airtight processing chamber openable to load a member-to-be-processed in the airtight processing chamber; a transfer apparatus to adjust a distance between the member-to-be-processed and a cooling unit that cools the member-to-be-processed, by moving the member-to-be-processed and/or the cooling unit; an induction heating apparatus to heat the member-to-be-processed, including a induction heating coil; a cooling apparatus to cool the member-to-be-processed by cooling the cooling unit; a temperature sensor to determine a temperature of the member-to-be-processed; and a controller to control the induction heating apparatus and the cooling apparatus based on the temperature determined by the temperature sensor.

Heating and cooling device

Growing community of inventors

Inagi, Japan

Mitsuhiro Naruse