Average Co-Inventor Count = 7.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (3 from 10,341 patents)
2. Tokyo Electron Kyushu Limited (3 from 85 patents)
3 patents:
1. 6063190 - Method of forming coating film and apparatus therefor
2. 5942035 - Solvent and resist spin coating apparatus
3. 5658615 - Method of forming coating film and apparatus therefor