Fujitsu Microelectronics Limited

Mitsuhiro Nakamura

Genichi Komuro

Tomohiro Takamatsu

Jirou Miura

Hirotoshi Tachibana

A ferroelectric capacitor including a bottom electrode (), a ferroelectric film () and a top electrode () is covered with an interlayer insulating film (). One end of the bottom electrode () is formed like comb teeth. To match with the remaining portion of that end, a plurality of contact holes () are formed in the interlayer insulating film (). In other words, gaps (notches) are formed in the bottom electrode () between lower ends of at least two of the contact holes (). And a wiring () connected to the bottom electrode () through the contact holes () is formed on the interlayer insulating film ().

Growing community of inventors

Kawasaki, Japan

Mitsuhiro Nakamura