Canon Kabushiki Kaisha

Mitsuharu Kohda

Kiyofumi Sakaguchi

Akira Fujimoto

Kazutaka Yanagita

This invention is to appropriately separate a bonded substrate stack regardless of some distortion in the bonded substrate stack or the like. This separating apparatus includes a first nozzle which forms a jet with a large width and a second nozzle which forms a jet with a small width. When the outer portion of a bonded substrate stack is to be separated, a jet formed by the first nozzle is used. After that, when a portion inside the outer portion is to be separated, a jet formed by the second nozzle is used.

Method and apparatus for separating member

This invention is to guarantee that in separating a plate member such as a bonded substrate stack, a fluid is injected to an appropriate portion of the plate member. While a bonded substrate stack () is rotated, the vertical position of its peripheral portion is measured throughout its perimeter by a measuring device (). Then, while the vertical position of a nozzle () is dynamically adjusted on the basis of the measurement result, and at the same time, the bonded substrate stack () is rotated, the bonded substrate stack () is separated into two substrates at a porous layer by injecting a fluid ejected from the nozzle ().

Separating apparatus and processing method for plate member

This invention is to support a plate member such as a bonded substrate stack in a horizontal state without coming into contact with one surface of the member and also to efficiently progress separation. Separation is executed while arranging a bonded substrate stack ( ) generated by bonding a seed substrate ( ) to a handle substrate ( ) such that the seed substrate ( ) remains on the lower side. At the first stage, the peripheral portion is separated while causing a first substrate support section ( ) to chuck and support the central portion of the lower surface of the bonded substrate stack ( ). Then, at the second stage, the central portion is separated while causing a second substrate support section ( ) to support the lower peripheral portion and side of the bonded substrate stack ( ).

Plate member separating apparatus and method

This invention is to appropriately separate a bonded substrate stack regardless of some distortion in the bonded substrate stack or the like. This separating apparatus includes a position adjusting mechanism ( ) for adjusting the position of a nozzle ( ) which ejects a fluid. A bonded substrate stack ( ) is separated while changing the level of the nozzle ( ) stepwise by the position adjusting mechanism ( ) in accordance with a program which is set in advance on the assumption that the bonded substrate stack ( ) has a distortion within a predetermined range.

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Kanagawa, Japan

Mitsuharu Kohda