Canon Kabushiki Kaisha

Mitsuharu Ezawa

Takeshi Yamamoto

Tomohiro Mizuno

Tatsuya Shinkai

Kazushi Shimomura

Ryuji Kimura

There is provided a transport system comprising: a stator having a first magnetic force unit; a mover having a second magnetic force unit; and a control unit. The control unit controls a magnetic force acting between the first magnetic force unit and the second magnetic force unit to transport the mover in a first direction. The stator has a first regulating member row including a plurality of first regulating members and a second regulating member row including a plurality of second regulating members, the mover, in a second direction intersecting the first direction, being disposed between the first regulating member row and the second regulating member row. The control unit performs a first process of applying a rotational force to the mover such that one of the first regulating members in the first regulating member row serves as a fulcrum when the mover contacts the first regulating member row.

Transport system and control method of transport system

A transport apparatus comprises: a stator including a plurality of coils arranged along a first direction; and a mover including a first magnet group having a plurality of magnets arranged along the first direction, the plurality of magnets arranged to face the plurality of coils in a second direction crossing the first direction, wherein the mover is driven toward the first direction by a magnetic force generated between the magnets and the coils, wherein the stator includes a first region in which the plurality of coils is arranged at given intervals and a second region adjacent to the first region, and wherein a magnetic compensator is arranged in the second region for compensating changes in magnetic energy distribution characteristics formed by the magnets and the coils in the first region.

Transport apparatus, vacuum apparatus, processing system, and a method for manufacturing an article

A production management system includes a storage unit and a controller. The storage unit is configured to store a holding position at which a first work is held among holding positions of the holding unit including first and second cases respectively capable of holding a plurality of works and a work ID identifying the first work in such a manner that the holding position and the work ID of the first work are associated each other. The controller configured to change information of the holding position associated with the work ID of the first work in the storage unit from a first position to a second position if, within the first case, the first work held at the first position is held anew in the second position different from the first position.

Production management system and production management method

A product conveyance apparatus includes an actuator, a movement portion, a first position detection portion, a second position detection portion, and a controller. The controller performs a process of causing the actuator not holding a product to move to a predetermined position, detecting the position of the actuator and storing the position as a first position, a process of causing the actuator to move on a basis of a movement instruction value and hold the product, causing the actuator holding the product to move to the predetermined position, detecting the position of the product held by the actuator, and storing the position as a second position, and a process of correcting and updating the movement instruction value on a basis of difference between the first position and the second position.

Method of conveying product, product conveyance apparatus, method of producing optical element, optical element production apparatus, and non-transitory computer-readable medium

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Yokohama, Japan

Mitsuharu Ezawa