Mitsui Petrochemical Industries, Ltd.

Miyachi Technos Corporation

Mitsugu Terada

Yasuo Oeda

Yuichiro Terashi

Ken Ohmata

Minoru Kojima

Hideaki Shibata

Michito Uehara

Takahiro Uchida

Kazuo Shimazaki

Kazuyoshi Sutoh

Shuntaro Watanabe

Hiroyuki Okuyama

Seigoh Murakami

Solid-state laser device

A laser light, whose wavelength is to be measured, is introduced into an etalon, a concentric circular interference stripe derived from the etalon is irradiated onto a one-dimensional photodetector array and a diameter of the interference stripe is measured to measure the wavelength of the laser light. Alternatively, if a reference laser light of known wavelength is introduced into the etalon, as described above, a wavelength measurement of extremely high accuracy can be made without being affected by positional deviations of the optical system.

Method and apparatus for detecting wavelength of laser beam

Discharge exciting excimer laser device

A laser output unit according to the present invention comprises a body having a laser output port at an extreme and thereof, lenses provided within said body to condense laser beam introduced to emit it from the laser output port, and a protective glass provided between said laser output port and said lens within said body. A gas jet port and a gas exhaust port opposed to said gas jet port are provided at said body portion between said protective glass and said laser output port. A gas crosses at a position between the protective glass and the laser output port. Flying matter is blown away by the gas and does not arrive at the protective glass.

Laser output unit

According to the present invention there are provided a solid-state laser device using a laser rod not smaller than 180 mm in length as a laser medium, thereby capable of providing a high output power, facilitating maintenance and inspection, and permitting the reduction of size and simplification in comparison with a conventional laser device using plural laser rods, as well as a machining apparatus using the said laser device as a machining energy source, and a solid-state laser device wherein a laser medium is held in a free state within a resonator so that a longitudinal direction of the laser medium is coincident with an optical axis direction of laser beam and so that the laser medium is capable of expansion or contraction in the said optical axis direction, thereby preventing the breakage of the laser medium and the deviation of the optical axis of laser beam.

Solid-state laser device and machining apparatus

Angles of inclination of the two wavelength selection elements arranged on an optical path of a laser beam source are varied to make a laser output variable. Light transmitting ranges of the two wavelength selection elements are coincided with each other so as to adjust the light wavelength bands, thereby the laser beam is narrowed without increasing its fineness.

Laser device

A gas laser apparatus having transparent laser windows provided on a laser chamber body, in which operating gases is sealed if necessary, comprising circulation means connected to the laser chamber body through an intake port and a discharge port for circulating gases within the laser chamber body and filtration means disposed in said circulation means, further comprising cutoff means for preventing the laser windows from being stained and open and closeably cutting off between the laser chamber body and the laser windows, and having a construction wherein in replacing the laser window, the cutoff means is once placed in a cutoff state, and the laser window is separated from the laser chamber body to place the laser window.

Gas laser apparatus

This invention is provided with a wavelength selecting means for uses in selectively receiving beam in compliance with each of a reference beam and a measured beam in order to simplify a correction or comparison of oscillating wavelengths in the laser device and further to improve a reliability and a controlling responsive speed.

Laser wavelength measuring device

According to the invention, a probe laser beam having a wavelength which is different from that of the laser beam emitted from a laser apparatus is introduced into the apparatus to adjust the optical device so that any fluctuations in the probe laser beam passing through or reflected from the optical device may be eliminated. Therefore, any fluctuations in output power and/or the oscillation wavelength of the narrowed bandwidth laser beam emitted from the apparatus can be directly detected and the laser apparatus can be so controlled as to ensure a stabilized operation under an optimum condition.

Growing community of inventors

Sodegaura, Japan

Mitsugu Terada