Other

Sanyo Electric Co., Ltd.

Mitsuaki Harada

Isao Yamada

Makoto Akizuki

Atsumasa Doi

Shigeharu Matsushita

Jiro Matsuo

Yoshiyuki Ishizuka

Takashi Goto

Hiroaki Furukawa

Satoru Ogasawara

Tatsuro Gueshi

Satoru Ogasahara

Method for forming gas cluster and method for forming thin film

Method for forming thin film with a gas cluster ion beam

A dielectric element employing an oxide-based dielectric film capable of suppressing oxidation of an electrode or deterioration of film characteristics of the oxide-based dielectric film is obtained. This dielectric element comprises an insulator film including the oxide-based dielectric film and the electrode including a first conductor film containing at least a metal and silicon. The aforementioned metal includes at least one metal selected from a group consisting of Ir, Pt, Ru, Re, Ni, Co and Mo. Thus, the aforementioned first conductor film serves as a barrier film for stopping diffusion of oxygen. In heat treatment for sintering the oxide-based dielectric film, therefore, oxygen is effectively inhibited from diffusing along grain boundaries of the electrode. Consequently, a conductive material located under the electrode can be inhibited from oxidation.

Dielectric element

A gate insulating layer and a first lower electrode are formed on a channel region of a silicon substrate, and an interlayer insulating film is formed on the silicon substrate so as to cover the first lower electrode and the gate insulating film. A buffer layer is formed on the interlayer insulating film, and a contact hole is formed in the interlayer insulating film and the buffer layer on the first lower electrode. A connecting layer and a second lower electrode are formed in the contact hole. A ferroelectric thin film and an upper electrode are formed in this order on the buffer layer so as to be brought into contact with the upper surface of the second lower electrode.

Dielectric device, dielectric memory and method of fabricating the same

Growing community of inventors

Ogaki, Japan

Mitsuaki Harada