Entegris, Inc.

Mitchell W McFeron

Glenn M Tom

Donald D Ware

Richard D Chism

Jordan Hodges

Donn Naito

Andy Krell

Steven Jackson

Joel Robison

A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.

Fluid delivery system and method

A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.

Ultra-high purity storage and dispensing of liquid reagents

Growing community of inventors

Austin, TX, United States of America

Mitchell W McFeron