Applied Materials, Inc.

Mitchell DiSanto

Andrew Nguyen

Paul Benjamin Reuter

Michael C Kuchar

Travis Morey

Robert Irwin Decottignies

Angela Rose Sico

Nagendra V Madiwal

Juan Carlos Rocha-Alvarez

Jeffrey C Hudgens

Charles T Carlson

Todd J Egan

Jason M Schaller

Benjamin B Riordon

Paul Zachary Wirth

Dmitry A Dzilno

Edward W Budiarto

Abraham Ravid

Gary Wyka

Paul Forderhase

Michael Carrell

Hari Kishore Ambal

Karen Lingel

Siva Chandrasekar

Venkata Raghavaiah Chowdhary Kode

Substrate transfer structure

An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.

Gas systems and methods for chamber ports

Gas apparatus, systems, and methods for chamber ports

A metrology system has an elongate stationary camera pixel array facing a workpiece transit path of a robot with an field of view corresponding to a workpiece diameter and extending transverse to the transit path portion, and a stationary elongate light emitting array generally parallel to the pixel array. An image control processor causes the camera to capture successive image frames while the robot is moving the workpiece through the transit path.

Metrology system for imaging workpiece surfaces at high robot transfer speeds

Growing community of inventors

Georgetown, TX, United States of America

Mitchell DiSanto