Pfeiffer Vacuum Gmbh

Pfeiffer Vacuum Technology Ag

Mirko Mekota

Armin Conrad

Jan Hofmann

Tobias Stoll

Florian Bader

Michael Schill

Bernhard Koch

Matthias Mädler

Andreas Rippl

Bernd Koci

Uwe Leib

Bernd Hofmann

Matthias Ankel

Adrian Wirth Dr Rer Nat

Peter Vorwerk

Jochen Böttcher

Adrian Wirth

Viktor Dorscht

Thilo Wille

Dominik Hahn

Sönke Gilbrich

Daniel Sieben

Pascal Wielsch

Herbert Stammler

Maximilian Birkenfeld

Michael SCHWEIGHÖFER

Marco Antonacci

Johannes Schnarr

A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.

Vacuum pump

A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.

Stator element for a holweck pump stage, vacuum pump having a holweck pump stage and method of manufacturing a stator element for a holweck pump stage

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Ehringshausen, Germany

Mirko Mekota