Other

Varian, Inc.

Miriam Spagnol

James B McGinn

An ion pump anode eliminates the intercellular spaces while maintaining an efficient cell shape in which the plasma sheath follows the contour of the cell wall. The cell are preferably quasi-cylindrical and can be manufactured by folding one or more metal strip into a corrugation and welding the strip to create separate cells. By eliminating the intercellular region, which support a high plasma density, the formation of dendrites under such a region is prevented and instabilities caused by those dendrites are eliminated.

Corrugated style anode element for ion pumps

A sputter ion pump incorporating a corrugated style anode comprising a plurality of cylindrical adjacent hollow cells provided with cross sections having substantially the same area and an arcuated perimeter.

Growing community of inventors

Turin, Italy

Miriam Spagnol