Micro Systems Engineering Gmbh

Biotronik Crm Patent Ag

Mirco Harnack

Ulrich Schmid

Dieter Schwanke

Achim Bittner

A method for producing a ceramic substrate material having a first layer and possibly a further layer is specified. The first layer comprises at least one first component made of a crystalline ceramic material and/or a glass material as a matrix and a second component made of a further crystalline ceramic material, which is provided in the matrix. An etching step is performed, mantle areas of the crystals and/or crystal agglomerates of the second component being etched selectively in the first layer to generate a cavity structure in the first layer. The present invention also relates to a corresponding ceramic substrate material, an antenna or an antenna array, and the use of the ceramic substrate material for an antenna or an antenna array.

Ceramic substrate material, method for the production and use thereof, and antenna or antenna array

The invention relates to a ceramic substrate material having a first layer having a cavity structure formed therein, and at least one sealing layer situated on at least a part of the cavity structure. The first layer comprises at least one first component made of a crystalline ceramic material and/or a glass material as a matrix, the first layer containing a second component made of a further crystalline ceramic material, with selected mantle areas of the crystals and/or crystal agglomerates of the second component being etched out in such a way that the cavity structure is provided (preferably in the form of a pore and/or tube structure). The sealing layer seals the surface of the first layer in the areas on which it is situated (e.g., above the cavity structure), allowing application of thin-film structures to the cavity structure.

The invention relates to a microreactor having a substrate () with at least one catalytically active material arranged in and/or on a cavity structure (). The substrate () has a first layer () and optionally at least one additional layer () of a ceramic material, with the first layer () being formed from a first component of a crystalline ceramic material and/or a glass material as the matrix and a second component of an additional crystalline ceramic material. The surface areas of the crystals and/or crystal agglomerates of the second component in the first layer () are etched out in at least some areas to form the cavity structure ().

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Berg, Germany

Mirco Harnack