Samsung Electronics Co., Ltd.

Mira Park

Hyunwoo Lee

Youngwook Kim

Sangkyung Lee

Yusin Yang

Younghoon Sohn

Sangkil Lee

Yongjun Ahn

Jeonghun Lim

Sojung Park

Yong Deok Jeong

Dusik Bae

Wonil Choi

Dongchol Choi

Hark-Joon Kim

Jiwoong Shin

Sangyoon Shin

Euihyun Roh

A detection device includes a transfer device to travel along a rail while gripping a carrier, and a detection structure mounted on the carrier. The detection structure includes a collector to suck in air, a detector connected to the collector, the detector including a plurality of sensors, a plurality of sensor control boards receiving electrical signals from the plurality of sensors, the plurality of sensor control boards generating, based on the electrical signals, type data and concentration data regarding pollutants included in the air sucked in by the collector, and a communication control board connected to the plurality of sensor control boards.

Pollutant detection devices and monitoring system having the same

Remote control

Methods and apparatuses for inspecting a semiconductor device using electron beam are provided. The methods may include performing detection operations on a detection target pattern N times and determining a number of detection operations which have been performed until a maximum secondary electron amount of the detection target pattern is obtained. Each of the detection operations may include irradiating the detection target pattern with an electron beam, interrupting the irradiating and detecting a secondary electron amount of the detection target pattern after a detection waiting time has elapsed since the interrupting the irradiating.

Methods and apparatuses for inspecting semiconductor devices using electron beams

Growing community of inventors

Suwon-si, South Korea

Mira Park