Entegris, Inc.

MinSeok Ryu

Yoonhae Kim

SangJin Lee

SeongCheol Kim

KieJin Park

YeRim Yeon

Some embodiments relate to a precursor comprising a precursor for vapor deposition. The precursor comprises an aliphatic hydrocarbon and at least one disilylamine group. The at least one disilylamine group is attached to the aliphatic hydrocarbon. The at least one disilylamine group does not comprise a silanide group. Some embodiments relate to a method for making the precursor. The method comprises reacting a polyamine compound and a silylhalide compound in a presence of a base to form a precursor useful for vapor deposition. Some embodiments relate to a method for forming a silicon-containing film using the precursor.

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Namdong-gu, South Korea

MinSeok Ryu