Tdk Corporation

Hitachi, Ltd.

Fujitsu Corporation

Other

Tdk Electronics Company, Limited

Hitachi Plant Engineering Construction Co., Ltd.

Bridgestone Corporation

Applied Materials, Inc.

Nissan Motor Company Limited

Nsk Corporation

Hitachi Automotive Engineering Co., Ltd.

Hitachi Plant Technologies, Ltd.

Asahi Breweries, Ltd.

Minoru Takahashi

Makoto Ono

Sadao Mitsui

Kaoru Uchiyama

Kanji Kawakami

Seiko Suzuki

Motohisa Nishihara

Tsutomu Kotani

Hitoshi Minorikawa

Tanetoshi Miura

Hareo Hamada

Hideo Sato

Takao Koshikawa

Mitsukuni Tsutsui

Hiroaki Hachino

Masayoshi Shinohara

Hiromitsu Hirayama

Shigeyuki Kobori

Hiroaki Wakamatsu

Katsuhide Sone

Katsumi Kiuchi

Takashi Kuribayashi

Koki Kanda

Muneo Kamiguchi

Keiichi Watanabe

Ryoji Harada

Masahiro Kobayashi

Shinya Igarashi

Satoshi Shimada

Masato Yoshikawa

Takao Sasayama

Yutaka Nishimura

Takashi Urano

Kazuji Yamada

Takayuki Yamamoto

Iwao Okamoto

Takeshi Ohwe

Shigeru Oho

Yoshiharu Kasamatsu

Hiroatsu Tokuda

Isao Nunokawa

Seikou Suzuki

Yutaka Misawa

Masaki Kameyama

Masahiro Komachiya

Keiichiro Mizuno

Masaharu Sugimoto

Setsuo Akiyama

Jinhan Choi

Rohit Mishra

Isatake Kaitsu

Seigo Igaki

Masao Hiyane

Noriharu Sato

Yasuhiro Kashirajima

Tadao Suzuki

Takumi Sugiura

Seiji Yoneoka

Takahiko Tanigami

Akio Kinoshita

Ryosaku Kanzawa

Kunio Suzuki

Tomio Oyachi

Masahiro Kurita

Seiichi Kashiwazaki

Masaru Iguchi

Yoshimichi Asanai

Shinichi Endo

Tsutomu Kooriyama

Hidenao Kawai

Kinichiro Asami

Yasushi Yoshimura

Hideki Hyoudo

Ryusuke Gotoda

Akio Akasaka

Masayoshi Sakuma

Ryuusuke Gotouda

Kouji Watanabe

Asako Yamamichi

Toshio Onodera

Hirosi Satou

Katsuhiro Joukou

Yoshihiro Kimoto

Kuniaki Tamura

Katuhiro Watanabe

Yutaka Shimokawa

Hiroshi Nishidome

Hidetoshi Furuya

Makoto Tanaka

Minoru Yonaga

Isekazu Shimizu

Yongjia Li

Koichi Izuhara

Yukio Nakamura

Masumi Takada

Mir Abdulla Al Galib

Takashi Enokida

Yoshitaka Oguri

Kiyoto Sudou

Masato Ito

In an embodiment, a method of processing a substrate includes introducing a first process gas or a mixture of the first process gas and a second process gas into an etch chamber; exposing the substrate to the first process gas or to the mixture of the first and second process gases, the substrate having halogen residue formed on an exposed surface, the substrate having high aspect ratio features; forming and maintaining a plasma of the first process gas or a plasma of the mixture of the first and second process gases in the etch chamber to remove the residue from the surface by applying a first source power; exposing the substrate to the second process gas; and forming and maintaining a plasma of the second process gas in the etch chamber to remove the residue from the surface by applying a second source power and a bias power.

Halogen abatement for high aspect ratio channel device damage layer removal for EPI growth

A dehumidifying system is disclosed which comprises a dehumidifying element to extract moisture from the air, a rotor to rotate the dehumidifying element, and a heat pump to cool and heat the air within the dehumidifying system. The dehumidifying unit has at least a regeneration zone and a dehumidifying zone. The dehumidifying zone is provided at a flow passage of supply air supplied to a low dew-point chamber and dehumidifies the supply air with a dehumidifying member. The regeneration zone allows regenerating air to pass through the dehumidifying member to regenerate the dehumidifying member. The heat pump is comprised of at least a condenser and an evaporator. The condenser of the heat pump is used to at least heat air passing through the regenerating zone and the evaporator of the heat pump is used to at least cool the supply air before it enters the dehumidifying zone.

Dehumidifying system

An MR head includes a slider, and a film structure part which is located on an air outflow side of the slider and includes an MR element for reproducing. The film structure part has an end surface located on an identical side as a floating surface of the slider. The end surface of the film structure part and the floating surface of the slider form a step-like recess which has a depth making it possible to prevent a fine projection on a magnetic disk from hitting the end surface of the film structure part.

Magnetic head and magnetic disk apparatus

The heater has increased quick responsiveness to temperature control of air, and the air conditioner can realize highly accurate temperature control using the heater. A duct unit having heat sources comprising electric lamps in the inside thereof is attached to an air duct. Air coming into contact with glass bulbs of the electric lamps is heated by radiant heat and transferred heat generated by lighting the electric lamps, whereby the heater with increased quick responsiveness to temperature control is obtained. A first heater and a second heater are provided in the air duct, respectively, and temperature sensors for controlling these heaters are attached to the air duct and a precision environment chamber, respectively, whereby temperature control in two stages with different temperature resolutions is made possible, and an air conditioner with high accuracy excellent in controllability can be provided.

Air-conditioning control apparatus using heater

Magnetic head with improved floating surface

Cellulosic single fibers such as cotton is prepared without any resins or pitches to a mass or bulk such as a lap which is self-shaped and retains its form by a force of cohesive intertanglement of fibers. The mass as prepared is heated for carbonization or graphitization, if desired, to obtain unique shaped carbides of porous and stable structures in which the cohesion of fibers is made more dense on account of the total shrinkage of the mass by carbonization.

Method for making shaped carbides of cohesively intertangled single fibers

A magnetic disk drive has a magnetic disk and a magnetic head assembly mounted on an arm. The assembly is utilized in the recording and reproducing of data on and from a recording/reproducing surface of a magnetic disk. The magnetic head assembly includes a support body for connecting the magnetic head assembly to the arm and a head chip attached to the support body. The head chip is configured and arranged for making substantially continuous sliding contact with the recording/reproducing surface of the magnetic disk during recording/reproducing. The head chip includes a wafer base, a read/write element for recording/reproducing data from the recording/reproducing surface of the magnetic disk. The read/write element is formed from a plurality of thin film layers superposed upon the wafer base and the head is elongated in a direction generally perpendicular to a plane generally defined by the recording/reproducing surface.

Magnetic head assembly with contact-type head chip mounting and electrically connecting arrangements

A hauling cord (L) for pulling an electric power line or the like cable into a conduit has an elongate linear body (,) that is typically a monofilament of a thermoplastic resin. The cord is of a regular or irregular cross section with one or more helical ridges (,) that extend around, along and integral with the linear body between opposite ends of the linear body. The helical ridges are formed by drawing and twisting a raw material of the linear body, and may have either of or both the opposite ends made thinner and/or twisted stronger than the remaining portion so that the pitch between the adjacent ridges is reduced. The cross section renders the cord lighter in weight and more slender, and nevertheless its compression strength and tensile strength are improved.

Hauling cord

Cellulosic single fibers such as cotton are prepared without any resins or pitches to a mass or bulk such as a lap which is self-shaped and retains its form by a force of cohesive intertanglement of fibers. The mass as prepared is heated for carbonization or graphitization, if desired, to obtain unique shaped carbides of porous and stable structures in which the cohesion of fibers is made more dense on account of the total shrinkage of the mass by carbonization.

Method for making shaped carbides of cohesively intertangled single

A method of evaluating a durability of a magnetic disk includes the steps of (a) obtaining conditions under which a sliding contact state of a first head with respect to a surface of a first magnetic disk stabilizes, and (b) causing a second head to make sliding contact with a surface of a second magnetic disk under the conditions and evaluating a durability of the second magnetic disk.

Method and apparatus for evaluating durability of magnetic disk

A method of obtaining a limit glide height in flying a head above a recording medium being rotated. The first step is storing the medium and the head into a chamber, stepwise reducing an air pressure in the chamber, and measuring a flying height of the head and a frequency of contact of the head with the medium in each step. The second step is performing head vanish to polish away projections on the medium by means of the head under such conditions that the head at least intermittently comes into contact with the medium. The third step is reproducing the air pressure in each step in the first step, and again measuring a flying height of the head and a frequency of contact of the head with the medium in each step. The final step is comparing a measured value of the frequency of contact in each step in the first step and a measured value of the frequency of contact in each step in the third step, and obtaining the limit glide height defined as a flying height of the head corresponding to the step in which a rate of change in the frequency of contact becomes largest.

Apparatus for evaluating magnetic recording medium

A magnetic head for vertical magnetic recording includes a return portion having a sufficiently large area confronting a magnetic recording medium, a main pole having its front end portion confronting the magnetic recording medium, a magneto-resistive film provided in the middle of a magnetic circuit, including the return portion, the main pole, and the magnetic recording medium. The magnetic head has its initial magnetization set in the direction virtually orthogonal to the direction of flux in the magnetic circuit. A first and a second terminal are connected to both ends of the magneto-resistive film. The magnetic circuit also includes a bypass magnetic path magnetically connecting the main pole with the return portion.

Magnetic head having bypass magnetic path and set magnetic reluctance

A physical quantity detecting apparatus comprises at least one optical fiber, at least one light emitting means for emitting an incident light beam on the optical fiber, at least one light receiving means for detecting an outgoing light beam from the optical fiber, physical quantity applied position information generating means for providing information indicative of a position of a portion at which a physical quantity is applied to the optical fiber, and operation means for receiving signals from the light receiving means and physical quantities applied position information generating means and calculating a change with time in physical quantity at respective positions on the optical fiber.

Physical quantity detecting apparatus and internal combustion engine

A three-phase brushless motor includes a rotary shaft, a rotor fixed to an outer surface of the rotary shaft, and a drive coil of three phases disposed around the rotor. An outer surface of the rotor is magnetized to have alternately and equidistantly arrayed S and N poles and a plural number of low flux density regions are provided in a gap between the outer surface of the rotor and an inner surface of the drive coil.

Three-phase brushless motor

A heater for heating a liquid in which the electrical contact between a PTC thermistor and electrode plates is surely realized, and the thermal coupling and the thermal efficiency are excellent. In a case 1, an internal space 13 has an opening 14 at one side portion, and the whole of the periphery of the case is closed except the opening 14. A pair of electrode plates 21 and 22 have projections 211 and 221 on faces 212 and 222, and are housed in the internal space 13 of the case 1 in such a manner that their other faces 223 are opposed to heat radiating faces 11 and 12. The PTC thermistors are disposed between the electrode plates 21 and 22 in such a manner that projections 211 and 221 are contacted with the electrodes 32 and 33, respectively. Thermal conductive fillers 41 and 42 made of a resin are charged between the electrodes 32 and 33 of the PTC thermistors 3 and the electrode plates 21 and 22 so as to fill the gaps which are formed by the projections 211 and 221.

PTC heater for use in liquid with close electrical and thermal coupling

Growing community of inventors

Chiba, Japan

Minoru Takahashi