Nippon Soda Co., Ltd.

Minoru Okada

Satoru Yamazaki

Hiroyuki Yamanaka

Masamichi Yasuhara

Kimihiko Oohata

Hideki Maekawa

Misamichi Yasuhara

A process for producing a cyclic silane compound, in which a chained polysilane is subjected to pyrolysis in the presence of an oxide of a transition metal belonging to Group 8 or Group 11 of the periodic table; and a process for producing a cyclic carbosilane compound, that includes subjecting a chained polysilane to pyrolysis in the presence of a simple substance of a metal selected from the group consisting of transition metal elements and elements belonging to Groups 12 to 15 of the periodic table, or a compound thereof.

Process for production of cyclic silane compound and/or cyclic carbosilane compound

The present invention relates to: a process for producing a cyclic silane compound, which comprises subjecting a chained polysilane to pyrolysis in the presence of an oxide of a transition metal belonging to Group 8 or Group 11 of the periodic table; and a process for producing a cyclic carbosilane compound, which comprises subjecting a chained polysilane to pyrolysis in the presence of a simple substance of a metal selected from the group consisting of transition metal elements and elements belonging to Groups 12 to 15 of the periodic table or a compound thereof.

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Niigata-ken, Japan

Minoru Okada