Kobelco Research Institute, Inc.

Minoru Matsui

Hiroshi Goto

Moriyoshi Kanamaru

Yuki Iwasaki

Akira Nambu

Provided is an oxide sintered body suitably used for producing an oxide semiconductor film for a display device, the oxide sintered body capable of forming an oxide semiconductor film exerting excellent conductivity, having high relative density and excellent in-plane uniformity, and exhibiting high carrier mobility. This oxide sintered body is obtained by combining and sintering a zinc oxide powder, a tin oxide powder, and an indium oxide powder. The oxide sintered body satisfies the following equation (1) when the oxide sintered body is subjected to X-ray diffraction, Equation (1): [A/(A+B+C+D)]&#xd7;100&#x2267;70. In equation (1), A represents the XRD peak intensity in the vicinity of 2&#x3b8;=34&#xb0;, B represents the XRD peak intensity in the vicinity of 2&#x3b8;=31&#xb0;, C represents the XRD peak intensity in the vicinity of 2&#x3b8;=35&#xb0;, and D represents the XRD peak intensity in the vicinity of 2&#x3b8;=26.5&#xb0;.

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Takasago, Japan

Minoru Matsui