Average Co-Inventor Count = 3.27
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Canon Kabushiki Kaisha (2 from 90,594 patents)
2. Hitachi, Ltd. (1 from 42,485 patents)
3 patents:
1. 6479212 - Photosensitive resin, resist composition using the photosensitive resin, pattern formation method using the resist composition, device produced by the pattern formation method, and exposure method
2. 6225019 - Photosensitive resin, resist based on the photosensitive resin, exposure apparatus and exposure method using the resist, and semiconductor device obtained by the exposure method
3. 6015596 - Fluorine-containing silicon network polymer, insulating coating thereof,