Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Hitachi-Kokusai Electric Inc. (1 from 1,258 patents)
1 patent:
1. 9337015 - Method of manufacturing a semiconductor device, method of processing a substrate, substrate processing apparatus, and recording medium