Hitachi, Ltd.

Minoru Fujimoto

Kiyoshi Okumura

Kouji Kuwabara

Kazuo Mera

Makoto Yano

Hiroo Ohkawa

Kouji Ishiguro

Kiyoshi Saito

Isao Hashimoto

Yoshio Yoshioka

Shigeo Shiono

Yasuo Yamashita

Akihiro Tanaka

Kazuhiko Nishimura

An ion injection device is provided which permits ion injection into a wafer with an optimum ion beam injection angle, and the ion injection device is characterized, by the provision of a wafer holding means for holding a wafer into which ion beam taken out from an ion source is implanted; a relative position varying means for varying the relative position between the wafer holding means and the ion beam within a plane substantially perpendicular to the direction of the ion beam; and an incidence angle varying means for varying an incidence angle of the ion beam on the surface of the wafer held on the wafer holding means. More specifically, the wafer holding means is a rotatable disk which holds a plurality of wafers on the circumference thereof, and the relative position varying means is constituted by a rotating means which causes the rotatable disk to rotate in a plane substantially perpendicular to the direction of the ion beam and by a rocking means for rocking the rotatable disk in a plane substantially perpendicular to the direction of the ion beam.

Ion injection device and method therefor

A light beam (30) including a random polarization and radiated from a light source, such as laser oscillator (6) is separated into P wave polarization light beam and S wave polarization light beam by a beam splitter 33. After modulated by image information representative of characters to be printed, both the P and S wave polarization beams are merged and the resultant light beam is projected on the surface of a workpiece for marking a pattern.

Apparatus for reducing, enlarging and projecting image information

A laser marking apparatus comprises a pulse laser oscillator which emits a linearly polarized laser beam; a transmission type liquid crystal mask which displays a pattern to be marked on an article in one of a positive pattern display mode and a negative pattern display mode by dots arranged in a matrix form and which allows to pass the emitted laser beam but differentiates the polarization plane of the laser beam which has passed through masked portions from that through unmasked portions; a polarized beam splitter disposed downstream the transmission type liquid crystal mask for selectivity passing the laser beam to be irradiated on the article to be marked from the transmission type liquid crystal mask; a TV camera for detecting a discriminator indicating the thermal conductivity of the article to be marked; a recognition unit which determines the thermal conductivity of the article to be marked based upon the detected discriminator; and a control unit which controls the transmission type liquid crystal mask to operate in one of the positive pattern display mode and the negative pattern display mode based upon the determined thermal conductivity of the article to be marked in such a manner that when the determined thermal conductivity of the article to be marked is low, the positive pattern display mode is selected and when the determined thermal conductivity of the article to be marked is high, the negative pattern display mode is selected.

Laser Marking apparatus

A laser marking system of the present invention is provided with an irradiation position changing device on a laser beam path for changing the irradiation positions of the laser beam corresponding to each marking area when a marking area including a plurality of irradiation marking areas is formed by irradiating the workpiece with the pulse laser beam which has passed a pattern of a mask. The plurality of irradiation marking areas are successively irradiated with the pulse laser beam from an irradiation position to form a marking area. Since the marking area larger than each irradiation marking area can be obtained, the whole laser marking system can be made smaller in size without increasing the output power of the pulse laser generator.

Laser marking system

A welded steel pipe being turned is subjected to a static magnetic field formed by a sensor. The sensor includes an electromagnet and a transmission and reception coil attached to the end surface of the electromagnet pole facing the steel pipe. The electromagnet is energized by a dc power supply and the transmission coil is supplied a pulse current at certain intervals. As the transmission coil is energized by the pulse current, transverse ultrasonic waves are generated in the steel pipe. The transverse ultrasonic wave propagates through the pipe in the thickness direction thereof and is reflected by the inner surface of the pipe and reaches the outer surface where it is detected by the reception coil. The signal received by the reception coil is amplified by an amplifier and fed to a signal processor which then locates the position of the weld according to the amplitude of the received signals.

Weld detector

Growing community of inventors

Hitachi, Japan

Minoru Fujimoto