Yokogawa Electric Corporation

Minoru Akutsu

Shinji Kobayashi

Hiroshi Sugawara

Akira Miura

Akira Toyama

Chie Sato

Katsuya Ikezawa

Yasushi Ichizawa

Hirotoshi Kodaka

Naomichi Chida

Yusuke Kishine

Tetsuya Ohtani

An apparatus for measuring the position and shape of a pattern formed on a sheet includes a sheet on which a pattern is formed, a camera holding mechanism that is disposed perpendicular to a transportation direction of the sheet, at least one camera that is disposed such that the camera is movable in a longitudinal direction of the camera holding mechanism, and an image processing computer that processes an image picked up by the at least one camera. In the measuring apparatus, when calibration is performed, calibration is performed with reference to a picked up image of the coating pattern and a picked up image of a reference body for calibration.

Apparatus for measuring position and shape of pattern formed on sheet

An inspection apparatus inspects an inspected object based on a waveform quality of a signal that the inspected object outputs. The inspection apparatus has a power supply section which outputs a control signal that controls an output of the inspected object, a waveform measuring section which measures the signal that the inspected object outputs to generate a waveform image, an analyzing section which derives a value indicating a waveform quality from the waveform image that the waveform measuring section measures, a deciding section which decides whether or not the value derived by the analyzing section satisfies a target value, and an optimizing section which changes a set value of the control signal that the power supply section outputs, based on a decision result of the deciding section.

Inspection apparatus

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Musashino, Japan

Minoru Akutsu