Seagate Technology Incorporated

Advanced Technology Materials, Inc.

Entegris, Inc.

Minna Hovinen

Glenn M Tom

Peter C Van Buskirk

Kevin T O'Dougherty

Donald D Ware

John Russell Kingery

Kirk Mikkelsen

Xiaoyue Huang

Ziyou Zhou

Deming Zhang

Oliver Ye Tao

In a method for depositing a layer of amorphous hydrogenated silicon carbide (SiC:H), a gas mixture comprising a reactive gas to inert gas volume ratio of 1:12 to 2:3 is introduced into a reaction chamber of a plasma-enhanced chemical vapor deposition apparatus. The reactive gas has a ratio of Si of 50 to 60, C of 3 to 13, and H of 32 to 42 at %. The inert gas comprises i) a first inert gas selected from helium, neon and mixtures; and ii) a second inert gas selected from argon, krypton, xenon and mixtures. The reaction plasma is at a power frequency of 1-16 MHz at a power level of 100 W to 700 W. The resulting layer exhibits a refractive index of not less than 2.4 and a loss of not more than 180 dB/cm at an indicated wavelength within 800 to 900 nm.

High refractive index hydrogenated silicon carbide and process

Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.

Liner-based liquid storage and dispensing systems with empty detection capability

An apparatus and associated method using a light source selectively emitting an incident beam. A thin film is disposed in a path of and responsive to the incident beam to produce a reflected beam. A light-sensing probe is capable of detecting the reflected beam. Ambient environment logic responsive to the light-sensing probe compares a position of the reflected beam to an expected position to make a characteristic determination of a selected ambient environment through which the incident beam propagated.

Sensing a selected ambient environment

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Edina, MN, United States of America

Minna Hovinen