Samsung Electronics Co., Ltd.

Minjun Lee

Kyunghwan Lee

Yongseok Kim

Hyuncheol Kim

Dongsoo Woo

Jongman Park

Daewon Ha

Youngji Noh

A three-dimensional semiconductor device includes a plate common source line, first and second word lines spaced apart from each other to at least partially define a vertical space therebetween, a channel pattern in the vertical space, a ferroelectric layer including a first portion between the channel pattern and the first word line, a second portion between the channel pattern and the second word line, and a third portion contacting the plate common source line, a bit line in the vertical space to contact the channel pattern and having a first width in a first horizontal direction, and a source line spaced apart from the bit line in the vertical space to contact the channel pattern, having a second width greater than the first width in the first horizontal direction, and having a source line contact portion inside the plate common source line.

Three-dimensional semiconductor device including ferroelectric transistor

A memory device is provided. The memory device includes a substrate, a fin structure on the substrate, a gate structure on the fin structure, a first source/drain at one end of the fin structure, and a second source/drain at the other end of the fin structure, wherein the gate structure includes a trap layer, a blocking layer, and a gate electrode layer sequentially stacked on the fin structure, the first source/drain is doped with or has incorporated therein dopants of a first conductivity-type, and the second source/drain is doped with or has incorporated therein dopants of a second conductivity-type dopants that are different from the dopants of the first conductivity-type.

Memory device

Disclosed is a semiconductor memory device including a substrate, a plurality of source lines extending in a first direction on the substrate, a plurality of word lines crossing the source lines and extending in a second direction different from the first direction, a plurality of bit lines crossing the source lines and the word lines and extending in a third direction different from the first direction and the second direction, and a plurality of memory cells disposed at intersections between the source lines, the word lines, and the bit lines. The first, second, and third directions are parallel to a top surface of the substrate.

Semiconductor memory device

Provided is a memory device. The memory device may include a substrate, a ferroelectric field effect transistor disposed on the substrate, a first channel contacting a gate structure of the ferroelectric field effect transistor and extending in a vertical direction from the gate structure of the ferroelectric field effect transistor, a selection word line disposed at one side of the first channel, a first gate dielectric layer disposed between the first channel and the selection word line, and a cell word line disposed on top of the first channel.

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Seoul, South Korea

Minjun Lee