Carestream Health, Inc.

Shanghai Huali Microelectronics Corporation

Tyco Electronics (shanghai) Co., Ltd.

Spreadtrum Communications (shanghai) Co., Ltd.

Shanghai Huali Integrated Circuit Corporation

Minjie Chen

Yu Ren

Zhimin Huo

Jin Xa Xu

Zaifeng Tang

Jian Ding

Jing Jing Zhang

Fuhuei Lin

Yukun Lv

David H Foos

Hong Qing Zhou

Yuming Song

Shaoyong Wang

Mingjie Fan

Feng Dai

Le Od Zhang

Xiaowei Luo

Xusheng Zhang

Hu Wei

Sen Wang

Jin Xu

Duan Xue

Haijun Niu

Quan Jing

The present application discloses a method for manufacturing shallow trench isolation, comprising: step: performing first time etching on a semiconductor substrate by means of a dry etching process to form the shallow trench, wherein in the first time etching, metal ions are released from a dry etching process chamber and deposited on the inner surface of the shallow trench, and the metal ions diffuse and form a contamination layer; and step: performing second time etching on the semiconductor substrate exposed on the inner surface of the shallow trench by means of a wet etching process to remove the contamination layer on the inner surface of the shallow trench. In the present application, the metal ions released from the dry etching process chamber and deposited on the inner surface of the shallow trench during the dry etching of the shallow trench can be removed.

Method for manufacturing shallow trench isolation

The present application discloses a preventive maintenance method for a chamber of a metal etching machine. An optimized burning cleaning recipe is added before the chamber is opened, and metal substances remaining on the surface of an electrostatic chuck are removed by adopting a cleaning/pumping down multi-step alternate method. Before the chamber is opened for preventive maintenance, the phenomenon of metal particles remaining on the surface of the electrostatic chuck can be significantly improved, thus solving the downtime problem caused by abnormal backside helium and ensuring the stability of mass production.

Preventive maintenance method for chamber of metal etching machine

A wireless power supply device comprises a transmitting coil assembly and a receiving coil assembly. The transmitting coil assembly includes a first ferrite core having a receiving chamber with an opening and a transmitting coil disposed in the receiving chamber of the first ferrite core. The receiving coil assembly is adapted to be moved into the receiving chamber through the opening of the receiving chamber and located at a predetermined position in the receiving chamber. The receiving coil assembly is electromagnetically coupled with the transmitting coil assembly.

Wireless power supply device and electrical apparatus

An alternating current load detection circuit comprises a first resistor connected in parallel to a load circuit, a diode full bridge circuit connected in series to the load circuit and the first resistor, a filter capacitor connected in parallel to the diode full bridge circuit, a second resistor, and a photoelectric coupler connected in parallel to the diode full bridge circuit. The photoelectric coupler and the diode full bridge circuit are connected in series and in parallel to the second resistor, respectively. The diode full bridge circuit includes a first diode, a second diode having a positive electrode electrically connected to a negative electrode of the first diode, a third diode having a negative electrode electrically connected to a positive electrode of the first diode, and a fourth diode having a positive electrode electrically connected to a negative electrode of the second diode and a negative electrode electrically connected to a positive electrode of the third diode.

Alternating current load detection circuit

The invention disclosed a method for forming shallow trenches of the dual active regions. Firstly, forming an etch stop layer on a semiconductor substrate; secondly, using a first accurate photomask to expose and develop the semiconductor substrate, until the etch stop layer has been exposed on the top of the first shallow trench regions and the second shallow trench regions; thirdly, etching the etch stop layer entirely in the exposed regions; fourthly, using a second photomask to expose and develop the first shallow trench regions which require a deeper etch depth of the trench than that of the second shallow trench regions; fifthly, etching and forming preliminary entirely depth in the first shallow trench regions, and then removing the second photomask; at last, taking the etch stop layer as a mask, and simultaneously etching the first shallow trench regions and the second shallow trench regions to form the first hallow trenches and the second shallow trenches having different depths. The invention has realized a low-cost photomask application and an optimization of the etching process by optimizing the photomask design.

Method for forming shallow trenches of the dual active regions

A method of etching a shallow trench is disclosed in the present invention. By removing the photoresist layer immediately at the end point of the hard mask layer etching and further using the improved process conditions etch the top of the substrate at the same time of the hard mask layer over-etching, such as a lower bias power, a higher pressure and a bigger polymer gases flow rate, the present invention has formed a smooth morphology on the top of the shallow trench. Therefore, the sharp corner appeared in the prior art is avoided by changing the start point of the silicon substrate etching, so as to fundamentally eliminate the leakage current caused by the sharp corner.

Method of etching a shallow trench

Method and apparatus for de-interlacing a television signal are provided. The method includes: determining whether a pixel to be interpolated is in a strictly static mode; if it is in the strictly static mode, obtaining a pixel value of a first pixel in a previous field which corresponds to the pixel to be interpolated, and setting a pixel value of the pixel to be interpolated to be equal to the pixel value of the first pixel; if it is not in the strictly static mode, determining gradient bands along a plurality of directions by taking the pixel to be interpolated as a center, determining a direction of the pixel to be interpolated based on the gradient bands, and setting the pixel value of the pixel to be interpolated by interpolation based on the direction. Accuracy of the pixel value of the pixel to be interpolated may be improved.

Method and apparatus for de-interlacing television signal

Shrinkage function model associated training schemes are used to facilitate obtaining denoised patches, and more particularly, to removing noise from images.

Methods and systems for denoising images

A method for displaying a radiographic image identifies a region of interest in a portion of the radiographic image, suppresses background image content within the identified region of interest, and enhances contrast of the image within the region of interest to form an enhanced region of interest. The enhanced region of interest is displayed within the remaining portion of the radiographic image.

Enhancement of region of interest of radiological image

A method for consistent rendering of two or more diagnostic images according to a region of interest. Image data as input code values are obtained for each of the two or more diagnostic images. The background image content is segmented from tissue image content for each of the two or more diagnostic images. Corresponding structures are identified within the tissue image content, and the region of interest is identified within the tissue image content for each of the two or more diagnostic images. The input code values are remapped to output code values for each of the two or more diagnostic images.

ROI-based rendering for diagnostic image consistency

A method for processing a radiographic image of a patient obtains radiographic image data and detects the position of inserted tubing or other foreign object in the obtained image and determines the tubing tip or object location. A region of interest in the neighborhood of the tubing tip or object location is defined and at least one anatomy structure within the region of interest is detected. The probability for mal-positioning of the tip or object is calculated by determining the position of the tip or object relative to the at least one anatomy structure.

Growing community of inventors

Shanghai, China

Minjie Chen