Samsung Electronics Co., Ltd.

Minji Park

Jeehyeok Kim

Sangwook Park

JoonHo Lee

Haeyoon Park

Dongho Shin

Kyoung-ae Lim

Dongyun Yeo

Youngeun Kim

Hyeokjin Choi

Daehyun Lee

Youngil Kang

Jaesuk Kim

Chunghun Lee

Kyoung-mi Choi

Disclosed is a plasma processing apparatus comprising a plasma electrode, an electrostatic chuck, and a diode board. The electrostatic chuck includes a microheater layer and a chuck electrode. The microheater layer includes an inner heater part and an outer heater part. The inner heater part includes a first inner heater in a first inner region that circumferentially surrounds a center of the microheater layer, and a second inner heater in a second inner region that circumferentially surrounds the first inner region. The outer heater part includes a first outer heater in a first outer region that circumferentially surrounds the second inner region, and a second outer heater in a second outer region that circumferentially surrounds the first outer region. A distance between centers of the first and second outer heaters is less than that between centers of the first and second inner heaters.

Plasma processing apparatus and semiconductor fabrication method using the same

An electronic device for diagnosing a fault of a plurality of external devices is disclosed. The electronic device comprises a communication unit and a processor. The processor receives, from the plurality of external devices, information related to an operation of the plurality of external devices through the communication unit; on the basis of the information related to the operation of any one of the plurality of external devices, determines whether any external device is operating abnormally; when the external device is operating abnormally, diagnoses the cause of the abnormality on the basis of the information related to the operation of the one external device and information related to an operation of another external device of the plurality of external devices that is relevant to the operation of the one external device; and provides, via the communication unit, information on the diagnosed abnormality to the at least one of the one external device and a communication device of a user of the external devices.

Electronic device and fault diagnosis method of electronic device

According to various embodiments, a robotic cleaner may include a battery; a driving device for moving the robotic cleaner; a cleaning device for allowing the robotic cleaner to perform cleaning work; and a processor configured to determine, as a zone that can be cleaned, a first zone in the entire space by considering the residual capacity of the battery and the location of a charging device, operate the driving device and cleaning device to perform cleaning of the first zone, and perform control such that the robotic cleaner moves to the location of the charging device. Other embodiments are possible.

Robotic cleaner and control method therefor

Clothing care machine

Growing community of inventors

Suwon-si, South Korea

Minji Park