Samsung Display Co., Ltd.

Minho Moon

Youngmin Moon

Sungsoon Im

Seungyong Song

Ji-Hee Son

Kyuhwan Hwang

Soonchul Chang

Jeongkuk Kim

Seul Bee Lee

In-Bae Kim

Junho Jo

DuckJung Lee

Inbae Kim

Jaesik Kim

Taewook Kang

Duckjung Lee

Seul Gee Lee

Kyu Hwan Hwang

Youngho Park

Hyeyong Chu

Jinoh Kwag

Areum Lee

An embodiment provides a deposition apparatus including a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck. In the mask frame, a first opening part is defined. The opening sheet is disposed on the mask frame. In the opening sheet, a second opening part overlapping the first opening part is defined. The deposition mask is disposed on the opening sheet. In the deposition mask, a plurality of third opening parts overlapping the second opening part are defined. The electrostatic chuck is disposed on the deposition mask and on which a substrate is disposed. The substrate is disposed on a surface of the electrostatic chuck, and AC power is applied to the deposition mask.

Deposition apparatus and method for seating mask of deposition apparatus

A mask assembly includes: a mask frame provided with a first opening defined through a center portion thereof and including an outer frame surrounding the first opening and provided with at least one concave portion defined therein; a mask body disposed to correspond to the first opening and provided with second openings defined therethrough and having an area smaller than the first opening; a first sub-mask disposed on the mask body, provided with third openings defined therethrough over an entire area thereof and having an area smaller than each of the second openings, and including a metal material; a second sub-mask disposed on the first sub-mask, provided with fourth openings defined therethrough over an entire area thereof and having an area smaller than each of the third openings in a plane, and including a polymer material; and a welding portion disposed on the second sub-mask in the concave portion.

Mask assembly and method of manufacturing the same

A mask assembly includes a mask frame in which a first opening is defined, the mask frame including a front surface through which the first opening extends, and a deposition mask which is attached to the front surface of the mask frame and through which a plurality of second openings is defined. The mask frame includes an in which the front surface extends along a direction of gravity, the deposition mask includes an initial mask which is attached to the front surface of the mask frame in the thereof and through which the plurality of second openings is defined, and the of the mask frame having the front surface which extends along the direction of gravity disposes the first opening of the mask frame corresponding to all of the plurality of second openings of the initial mask along the direction of gravity.

Mask, method of providing the same, and method of providing display panel using mask

A mask assembly includes a mask frame through which a plurality of openings is defined and a plurality of cell masks disposed to respectively correspond to the cell openings. Each of the cell masks includes a mask main body substantially parallel to a plane defined by a first direction and a second direction crossing the first direction, where a plurality of holes is defined through the mask main body, a bonding portion disposed along an edge of the mask main body, and a tensile portion extending from the bonding portion and disposed spaced apart from the mask main body. The tensile portion includes first tensile portions spaced apart from each other in the first direction and disposed at opposite sides of the mask main body and second tensile portions spaced apart from each other in the second direction and disposed at opposite sides of the mask main body.

Mask assembly, mask manufactured using the same, and method of manufacturing display panel

A mask, a mask assembly, and a method of fabricating a mask are disclosed herein. The mask comprises a polymer film in which at least one cell region and at least one peripheral region are defined, the at least one peripheral region surrounding the at least one cell region, a conductive layer disposed on the polymer film and including a metal, an inorganic layer disposed between the polymer film and the conductive layer and including a silicon-based inorganic material, and holes that penetrate the polymer film, the conductive layer, and the inorganic layer and overlap the at least one cell region in a plan view.

Mask, mask fabrication method, and mask assembly

A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.

Deposition apparatus having mask assembly and method of repairing the mask assembly

A mask repairing apparatus includes a laser which emits a laser beam toward a welding portion between an opening sheet disposed on a mask frame and a cell mask disposed on the opening sheet, a fixing part disposed below the opening sheet to fix the opening sheet, and a suction part adjacent to the laser. The cell mask is separated from the opening sheet by the laser beam.

Mask repairing apparatus and mask repairing method using the same

A mask includes a protruding portion provided with a deposition hole formed therethrough and including an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.

Mask and deposition apparatus including the same

Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.

Mask and method of manufacturing the same

A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.

Mask, method of providing mask, and method of providing display panel using the same

An apparatus for manufacturing a display device includes: a mask assembly, wherein the mask assembly includes: a mask frame including an open area; a first mask disposed on the mask frame, the first mask including at least one opening; a second mask disposed on the first mask, the second mask including a mesh portion having a mesh shape and a blocking member to shield a portion of the mesh portion; and a first support supporting a display substrate on the second mask and separating the display substrate from the second mask, wherein the blocking member overlaps the opening.

Mask assembly and method of manufacturing mask assembly of display device having first and second masks with a support coupled to the second mask

Provided is a mask which includes a mask body having a plurality of through hole portions and including a polymer film and a plurality of magnetic particles dispersed in the polymer film, and a polymer coating layer disposed on an outer surface of the mask body. Accordingly, the time and cost of manufacturing a mask are reduced and the precision of a deposition process is improved as well, so that the manufacturing yield of a display panel using the mask is improved and a display panel manufactured using the same has improved reliability.

Mask, method of manufacturing the same, and method of manufacturing display panel

A display apparatus includes a substrate including first and display areas, wherein the first display area includes first and second pixel areas and a transmission area; a first pixel disposed in the first pixel area and including a first pixel electrode, a first counter electrode, and a first intermediate layer between the first electrode and the first counter electrode; and a second pixel disposed in the second pixel area and including a second pixel electrode, a second counter electrode, and a second intermediate layer between the second pixel electrode and the second counter electrode. The first and second counter electrodes are disposed in the first and second pixel areas, and the first and the second counter electrodes include a first contact area where the first and the second pixel areas are adjacent to each other. A method of manufacturing the display apparatus is provided.

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Yongin-si, South Korea

Minho Moon