The University of Tokyo

Seiko Instruments Inc

Minh-Dung Nguyen

Kiyoshi Matsumoto

Isao Shimoyama

Hidetoshi Takahashi

Manabu Oumi

Yoko Shinohara

Takeshi Uchiyama

Masayuki Suda

Masataka Shinogi

Tomoyuki Takahata

Tetsuo Kan

Binh-Khiem Nguyen

Hoang-Phuong Phan

Kenta Kuwana

A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.

Pressure sensor

A pressure sensor which detects variation in pressure, the pressure sensor including a cantilever which bends according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and a first gap, a second gap, and a third gap which are formed on a proximal end portion of the cantilever. The first to third gaps electrically partition the proximal end portion of the cantilever into a first support portion, a second support portion, a first displacement detection portion, and a second displacement portion in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion of the cantilever are connected to each other in plan view. The first and second displacement detection portions detect displacement according to the bending of the cantilever between the first and second support portion.

A pressure sensor includes a sensor main body having a cavity, a cantilever having a lever main body and lever support-portion, which is bent according to a pressure difference between the cavity and sensor outside main body, and a displacement detection unit detects cantilever displacement based on resistance variation in resistance values of the main body-resistance portion formed in the lever main body and lever-resistance portion formed in the lever support-portion. A division groove is formed in the lever support; the division divides the lever-resistance portion into a first resistance portion electrically connected to a detection-electrode in series and second resistance portion closer to other adjacent lever support-portion than the first resistance portion. The first resistance portion of the lever support-portion electrically connected to the detection-electrode via a parallel path of a first path passing through the main body-resistance portion and second path passing through the second resistance portion.

Cantilever pressure sensor with division portions for dividing lever resistance and having piezoresistor element

The present invention achieves a pressure-sensitive sensor which can detect information on a pressure, a sound pressure, acceleration, gas and the like, with high sensitivity. The pressure-sensitive sensor includes: a cantilever (); a frame () which is provided around the cantilever () and holds a base end of the cantilever (); a gap () formed between the cantilever () and the frame (); and a liquid () which seals the gap ().

Pressure-sensitive sensor

A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency f(Hz) defined by Expression (1), where a width (&#x3bc;m) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k.&#xb7;()&#x2003;&#x2003;(1)

Pressure sensor having cantilever and displacement measurement unit

There is provided a differential pressure sensor capable of measuring a pressure fluctuation with a simple structure. The differential pressure sensor includes a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior, and a detector provided at the opening. The detector includes a cantilever provided in a manner tiltable so as to block off the opening, and the cantilever is formed with a Piezo resistor layer.

Growing community of inventors

Tokyo, Japan

Minh-Dung Nguyen