Western Digital (fremont), Inc.

Western Digital Technologies, Inc.

Mingjun Yu

Tsung Yuan Chen

Donghong Li

Min Zheng

Shawn M Tanner

Kyung Lee

Tao Pan

Hai Sun

Lien-Chang Wang

Xianzhong Zeng

Lieping Zhong

Pradeep Senanayake

Disclosed herein are embodiments of a heat-assisted magnetic recording (HAMR) head that includes a near-field transducer (NFT) with a trailing bevel. Also disclosed are sliders and data storage devices comprising those HAMR heads, and methods of manufacturing HAMR heads with NFTs having trailing bevels. A HAMR head comprises a waveguide core, a main pole, and a NFT comprising a trailing beveled edge at an acute angle to an air-bearing surface (ABS) of the HAMR head. A method of fabricating a HAMR head comprises depositing material for a NFT, creating a trailing-side surface of the NFT, and creating a trailing beveled edge in the trailing-side surface of the NFT at the ABS, and forming a dielectric layer over the trailing beveled edge. The trailing beveled edge is at an acute angle to the ABS, and a remainder of the trailing-side surface of the NFT is substantially perpendicular to the ABS.

HAMR head with near-field transducer (NFT) with trailing bevel

A magnetic write apparatus includes a pole and a near field transducer. The pole extends in a yoke direction from a media facing surface where the yoke direction extends perpendicular to the media facing surface. The near field transducer includes a near field transducer cap and a near field transducer nose. The near field transducer nose is separated from the pole by the near field transducer cap and a dielectric gap and the near field transducer nose comprises a bevel surface that forms a bevel angle with a plane extending in the yoke direction.

Heat assisted magnetic recording head having near-field transducer with a sloped nose

A method for fabricating a near-field transducer (NFT) for a heat assisted magnetic recording (HAMR) write apparatus is described. The HAMR write apparatus is coupled with a laser for providing energy and has a media-facing surface (MFS) configured to reside in proximity to a media during use. The method includes providing a stack on an underlayer. The stack includes an endpoint detection layer, an optical layer and an etchable layer. The optical layer is between the etchable and endpoint detection layers. The etchable layer is patterned to form a mask. A portion of the optical layer is removed. A remaining portion of the optical layer has a bevel at a bevel angle from the MFS location. The bevel angle is nonzero and acute. The NFT is provided such that the NFT has an NFT front surface adjoining the bevel and at the bevel angle from the MFS location.

Method for providing heat assisted magnetic recording write apparatus having a near-field transducer with a sloped nose

A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer having a substantially flat bottom surface is provided. A trench is formed in the intermediate layer. The trench is wider in yoke region than in the pole tip region. The trench has a first depth in the yoke region and a second depth less than the first depth in the pole tip region. A portion of the intermediate layer is at the bottom of the trench at the ABS location. A nonmagnetic layer is provided. The nonmagnetic layer fills part of the trench in the pole tip region such that the trench has a third depth less than the second depth at the ABS location. A main pole is provided. The main pole has a leading bevel adjacent to nonmagnetic layer in the portion of the pole tip region of the trench.

Method for fabricating a magnetic write pole having a leading edge bevel

A method and system provide a magnetic transducer having an air-bearing surface (ABS) location, a pole and a gap. The pole has a bottom and a top wider than the bottom. The gap is on the top of the pole and at least as wide as the top of the pole such that an overhang is formed between a top edge of the gap and a bottom edge of the bottom of the pole. The method includes providing a plurality of bottom antireflective coatings (BARCs). The plurality of BARCs form a BARC layer that fills the overhang. A shield photoresist mask is provided on at least a portion of the BARC layer. The shield, which includes at least one side shield, is provided.

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Sunnyvale, CA, United States of America

Mingjun Yu