Parker-hannifin Corporation

Praxair Technology, Inc.

Ming Zhou

David Huang

Thomas A Clement

Timothy Dale Moser

David Picheng Huang

A system for preparing a microcellular polyurethane material, includes a froth, prepared, for instance, by inert gas frothing a urethane prepolymer, preferably an aliphatic isocyanate polyether prepolymer, in the presence of a surfactant; a filler soluble in a CMP slurry; and a curative, preferably including an aromatic diamine and a triol. To produce the microcellular material, the froth can be combined with the filler, e.g., PVP, followed by curing the resulting mixture. The microcellular material has a low rebound and can dissipate irregular energy and stabilize polishing to yield improved uniformity and less dishing. CMP pads using the microcellular material have pores created by inert gas frothing throughout the pad polymer body and additional surface pores created by dissolution of fillers during polishing, providing flexibility in surface softness and pad stiffness.

Damping polyurethane CMP pads with microfillers

An enclosure for housing circuitry of an electronic device including at least one enclosure part, and a shielding layer on the part. The enclosure part has an exterior surface and an opposing interior surface defining a wall therebetween, and is formed of a plastic material which is generally transparent. The shielding layer is provided to cover at least a portion of the interior surface of the enclosure part. The layer is formulated to provide EMI shielding for the circuitry housed within the enclosure, and as coated or otherwise applied to the interior surface is visually perceptible through the exterior surface of the enclosure part for enhancing the cosmetic appearance of the enclosure.

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Boxborough, MA, United States of America

Ming Zhou