Taiwan Semiconductor Manufacturing Comp. Ltd.

Ming-Yang Chuang

Cheng-Ming Wu

Li-Jen Wu

Teng-Yi Huang

Fu-Jen Tien

Ming-Hsiang Hung

Teng-Hwee Ng

A coater includes a chuck, a source of a coating material, a dispensing head, an exhaust system, and a liner. The chuck is configured to support a wafer. The dispensing head is configured to dispense the coating material onto the wafer. The exhaust system is configured to exhaust the excess coating material. The liner is present at least partially on an inner surface of the exhaust system. The liner has a stick resistance to the coating material, and the stick resistance of the liner is greater than a stick resistance of the inner surface of the exhaust system.

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Tainan, Taiwan

Ming-Yang Chuang