Taiwan Semiconductor Manufacturing Comp. Ltd.

Ming-Sze Chen

Chin-Shen Hsieh

Sheng-Yuan Lin

Yuan-Hsin Chi

Hung-Chih Wang

Yin-Tun Chou

Yu Li Wang

A wafer storage elevator and method for detecting wafer position shift. The elevator includes a first storage elevator sidewall, a second storage elevator sidewall, and a storage seat positioned between the first and second storage elevator sidewalls. A first mirror block is coupled to a front side of the storage seat having a mirror positioned on a top surface of the block, and a second mirror block is coupled to the front side of the storage seat having a mirror that is positioned on the top surface of the second mirror block. The mirror of the first mirror block reflects a laser beam from an emission sensor to the second mirror block, and the mirror of the second mirror block reflects the laser beam from the mirror of the first mirror block to a receive sensor. A wafer misalignment is determined based upon an output of the receive sensor.

Wafer shift detection

A connect structure for semiconductor processing equipment includes a housing configured to mate a deformable pipe with a non-deformable pipe. The housing includes a first annular sidewall to receive the deformable pipe and a second annular sidewall defining a first thread structure. An annular bead is connected to the first annular sidewall to flexibly deform the deformable pipe toward the non-deformable pipe structure when the first thread structure rotatably engages a second thread structure of the non-deformable pipe.

Connect structure for semiconductor processing equipment

A radio frequency (RF) match assembly for a chemical vapor deposition processing chamber. The assembly includes a top electrically insulating column and a bottom electrically insulating column. The assembly further includes a one-piece RF match strap that has a head, a main body and a body extension. The main body of the one-piece RF match strap is configured to extend through the top electrically insulating column and the bottom electrically insulating column. A flexible chamber lid strap connects the processing chamber to the top of the one piece RF match strap.

Radio frequency match strap assembly

Converter and conversion method for converting a click position of a flat panel display into a light pen simulated signal for a semiconductor manufacturing machine are provided. A converter includes a first connector, a second connector, and a controller coupled between the first connector and the second connector. The first connector is configured to obtain the click position from the flat panel display. The second connector is configured to provide the light pen simulated signal to the semiconductor manufacturing machine according to a synchronization signal from the semiconductor manufacturing machine. The controller is configured to generate the light pen simulated signal according to the click position and a mapping table of a first display resolution of the flat panel display and a second display resolution of the semiconductor manufacturing machine. The first display resolution is higher than the second display resolution.

Converter and conversion method for converting click position of display into light pen simulated signal for semiconductor manufacturing machine

Converter and conversion method for converting a click position of a flat panel display into a light pen simulated signal for a semiconductor manufacturing machine are provided. A first interface circuit is configured to communicate with the flat panel display to obtain the click position. A second interface circuit is configured to communicate with the semiconductor manufacturing machine to obtain horizontal and vertical synchronization signals. A memory is configured to store a first display resolution of the flat panel display and a second display resolution of the semiconductor manufacturing machine. A processor is configured to obtain the light pen simulated signal according to a light pen position corresponding to the click position and the first and second display resolutions and to control the second interface circuit to provide the light pen simulated signal to the semiconductor manufacturing machine according to the horizontal and vertical synchronization signals.

Converter and conversion method for converting a click position of a flat panel display into a light pen simulated signal for a semiconductor manufacturing machine are provided. The converter includes a first connector, a second connector, and a controller. The first connector is configured to receive a first display resolution and the click position from the flat panel display. The second connector is configured to receive a synchronization signal and a second display resolution from the semiconductor manufacturing machine. The controller is configured to obtain the light pen simulated signal according to a light pen position corresponding to the click position, and to control the second connector to provide the light pen simulated signal to the semiconductor manufacturing machine according to the synchronization signal.

Converter and conversion method for converting a click position of a flat panel display into a light pen simulated signal for a semiconductor manufacturing machine are provided. A converter includes a first connector, a second connector, and a controller. The first connector is configured to relay the click position of the flat panel display with a first display resolution. The second connector is configured to relay a horizontal synchronization signal and a vertical synchronization signal from the semiconductor manufacturing machine and a second display resolution. The controller converts the click position into a light pen position according to the first and second display resolutions, and provides the light pen simulated signal to the semiconductor manufacturing machine through the second connector according to the light pen position, the horizontal synchronization signal and the vertical synchronization signal.

Growing community of inventors

Hsinchu, Taiwan

Ming-Sze Chen