Atomic Energy Council-Institute of Nuclear Energy Research

Atomic Energy Council

Ming-Song Yang

Jyh-Ming Yan

Shiaw-Huei Chen

Yung-Chih Chen

Men-Han Huang

Yuh-Jenq Yu

Chih-Ching Tzeng

Den-Lian Lin

A dual-mode non-thermal plasma reactor includes an air-buffering chamber, a magnetic element provided on the air-buffering chamber, a first electrode disposed in the air-buffering chamber, a second electrode disposed in the air-buffering chamber opposite to the first electrode, a high-voltage power supply connected to the first and second electrodes and an air-swirling chamber located between the first and second electrodes. The air-swirling chamber includes a first isolating film covering on an internal side of the first electrode, a second isolating film covering on an internal side of the second electrode and an isolating tube placed between the first and second isolating films. An air passageway is defined through the first and second isolating films. An air-swirling space is defined by the first and second isolating films and the isolating tube. The isolating tube includes at least one tunnel in communication with the air-swirling space.

Dual-mode plasma reactor

Atmospheric gas discharge plasma is generated in a gas whirlpool cavity. Then the plasma is sprayed out in a gas flow to clean an object. The whole process is simple with merits of utility and cost savings. And objects can be cleaned one after one continuously.

Cleaning device using atmospheric gas discharge plasma

The present invention provides a reactor utilizing high-voltage discharge for processing exhausted hydrogen gas emitted during membrane plating, etching, or washing of semiconductors, where higher than 95% of destruction and removal efficiency (DRE) of hydrogen gas is obtained.

High-voltage discharging reactor processing exhausted hydrogen gas

Growing community of inventors

Taipei, Taiwan

Ming-Song Yang