Taiwan Semiconductor Manufacturing Comp. Ltd.

Ming-Rong Fu

Constance Chu

Ying-Wei Hsu

Rex Lin

Nai-Tien Ou

Hsin-Chien Tsai

Jiun-Shian Shiau

Automatic methods and systems for manufacturing recipes feedback control. Relationships among manufacturing recipes are determined. Wafers are processed based on the manufacturing recipes. The wafers are measured by metrology tools after processing. Feedback information for the manufacturing recipes is acquired from the metrology tool. The manufacturing recipes are automatically modified according to the feedback information and the determined relationships.

Automatic methods and systems for manufacturing recipe feedback control

A recipe comparison system having recipe management ability in both offline accessing and online operating modes. The recipe comparison system includes an equipment server, an analysis module, and a recipe management module. The equipment server receives an upload signal, and then sends a recipe to the analysis module based on the upload signal. Then, the analysis module parses the recipe into internal-format-data according to a parsing rule, and outputs the internal-format-data to the recipe management module. If the recipe comparison system is in offline accessing mode, the recipe management module checks whether the internal-format-data obeys a specification definition. If the recipe comparison system is in the online operating mode, the recipe management module compares the internal-format-data with a standard recipe stored in a storage module.

Recipe comparison system

Growing community of inventors

Taoyuan Hsien, Taiwan

Ming-Rong Fu