Gudeng Equipment Co., Ltd.

Ming-Mo Lo

Lin-Hsin Tu

Yin-Feng Chan

A drawer-replaced cleaning apparatus comprises: a box, at least one cleaning module and a lifting power module, the box has an accommodating space and a drawer, the drawer is located in the accommodating space, and may be pulled out from one side of the box, a bottom surface of the drawer has at least one mounting slot, the at least one cleaning module is detachably disposed in the mounting slot, the lifting power module is located in the accommodating space, and disposed below the cleaning module, the lifting power module passes through the mounting slot to push the cleaning module up away from the drawer, and the lifting power module is lowered so that the cleaning module is relocated in the mounting slot. The present disclosure solves the problem that the cleaning module of the prior art is difficult to replace.

Drawer-replaced cleaning apparatus

An inner pod holding device conducive to reducing dust contamination comprises a separator, a plurality of supporters, a first positioning module, and a second positioning module. The separator defines a concealing space and a holding space. The plurality of supporters is disposed in the holding space. The first positioning module includes a first driving member and at least one first positioning member. The first driving member is disposed in the concealing space and configured to move in a first direction. The second positioning module includes a second driving member and at least one second positioning member. The second driving member is disposed in the concealing space and configured to move in a second direction. The first and second positioning members each have a top portion protruding to the holding space. An optical inspection apparatus with the inner pod holding device is further provided.

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Taipei, Taiwan

Ming-Mo Lo