Agency for Science, Technology and Research

Ming Lin Julius Tsai

Navab Singh

Nansheng Shen

Bo Woon Jeffrey Soon

Lynn Khine

Jiaqiang Eldwin Ng

Jinli Qu

According to embodiments of the present invention, a piezoelectric resonator is provided. The piezoelectric resonator includes a piezoelectric substrate, a first electrode comprising a first plurality of electrode fingers, a second electrode comprising a second plurality of electrode fingers, wherein the first plurality of electrode fingers and the second plurality of electrode fingers are interdigitated, and wherein electrode patches are arranged along the first plurality of electrode fingers and the second plurality of electrode fingers according to a 2-dimensional lattice.

Piezoelectric resonator having electrode fingers with electrode patches

Embodiments provide a switching device. The switching device includes a substrate, which includes a contact region. The switching device further includes a vertical layer arrangement extending from the substrate next to the contact region. The vertical layer arrangement includes a control layer. The switching device further includes a freestanding silicon cantilever extending vertically from the contact region.

Switching device and a method for forming a switching device

According to embodiments of the present invention, a transducer is provided. The transducer includes a first electrode, a second electrode disposed over the first electrode such that the first electrode and the second electrode form respective capacitive electrodes of a capacitor, the second electrode comprising a core portion and a peripheral portion, a third electrode disposed relative to the second electrode such that the third electrode overlaps with the peripheral portion of the second electrode, and a piezoelectric element disposed between the peripheral portion of the second electrode and the third electrode, so as to tune a tensional force provided by the piezoelectric element onto the second electrode by varying a piezoelectric voltage applied between the second electrode and the third electrode.

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Singapore, Singapore

Ming Lin Julius Tsai