Efficient Power Conversion Corporation

Efficient Power Coversion Corporation

Ming-Kun Chiang

Robert A Beach

Jianjun Cao

Alexander Lidow

Alana Nakata

Seshadri Kolluri

Guangyuan Zhao

Robert Strittmatter

Yanping Ma

Chunhua Zhou

Jiali Cao

Agus Jauhar

Fang Chang Liu

Fang-Chang Liu

Michael Andrew De Rooij

Michael A De Rooji

Stephen L Colino

A GaN transistor with polysilicon layers for creating additional components for an integrated circuit and a method for manufacturing the same. The GaN device includes an EPI structure and an insulating material disposed over EPI structure. Furthermore, one or more polysilicon layers are disposed in the insulating material with the polysilicon layers having one or more n-type regions and p-type regions. The device further includes metal interconnects disposed on the insulating material and vias disposed in the insulating material layer that connect source and drain metals to the n-type and p-type regions of the polysilicon layer.

GaN transistors with polysilicon layers used for creating additional components

An integrated circuit having a substrate, a buffer layer formed over the substrate, a barrier layer formed over the buffer layer, and an isolation region that isolates an enhancement mode device from a depletion mode device. The integrated circuit further includes a first gate contact for the enhancement mode device that is disposed in one gate contact recess and a second gate contact for the depletion mode device that is disposed in a second gate contact recess.

Integrated circuit with matching threshold voltages and method for making same

A GaN transistor with reduced output capacitance and a method form manufacturing the same. The GaN transistor device includes a substrate layer, one or more buffer layer disposed on a substrate layer, a barrier layer disposed on the buffer layers, and a two dimensional electron gas (2DEG) formed at an interface between the barrier layer and the buffer layer. Furthermore, a gate electrode is disposed on the barrier layer and a dielectric layer is disposed on the gate electrode and the barrier layer. The GaN transistor includes one or more isolation regions formed in a portion of the interface between the at least one buffer layer and the barrier layer to remove the 2DEG in order to reduce output capacitance Coss of the GaN transistor.

GaN device with reduced output capacitance and process for making same

A GaN transistor with polysilicon layers for creating additional components for an integrated circuit. The GaN device includes an EPI structure and an insulating material disposed over EPI structure. Furthermore, one or more polysilicon layers are disposed in the insulating material with the polysilicon layers having one or more n-type regions and p-type regions. The device further includes metal interconnects disposed on the insulating material and vias disposed in the insulating material layer that connect source and drain metals to the n-type and p-type regions of the polysilicon layer.

GaN transistors with polysilicon layers for creating additional components

A method for forming an enhancement mode GaN HFET device with an isolation area that is self-aligned to a contact opening or metal mask window. Advantageously, the method does not require a dedicated isolation mask and the associated process steps, thus reducing manufacturing costs. The method includes providing an EPI structure including a substrate, a buffer layer a GaN layer and a barrier layer. A dielectric layer is formed over the barrier layer and openings are formed in the dielectric layer for device contact openings and an isolation contact opening. A metal layer is then formed over the dielectric layer and a photoresist film is deposited above each of the device contact openings. The metal layer is then etched to form a metal mask window above the isolation contact opening and the barrier and GaN layer are etched at the portion that is exposed by the isolation contact opening in the dielectric layer.

Method to fabricate self-aligned isolation in gallium nitride devices and integrated circuits

An integrated semiconductor device which includes a substrate layer, a buffer layer formed on the substrate layer, a gallium nitride layer formed on the buffer layer, and a barrier layer formed on the gallium nitride layer. Ohmic contacts for a plurality of transistor devices are formed on the barrier layer. Specifically, a plurality of first ohmic contacts for the first transistor device are formed on a first portion of the surface of the barrier layer, and a plurality of second ohmic contacts for the second transistor device are formed on a second portion of the surface of the barrier layer. In addition, one or more gate structures formed on a third portion of the surface of the barrier between the first and second transistor devices. Preferably, the one or more gate structures and the spaces between the gate structures and the source contacts of the transistor devices collectively form an isolation region that electrically isolates the first transistor device from the second transistor device.

Isolation structure in gallium nitride devices and integrated circuits

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Hsinchu, Taiwan

Ming-Kun Chiang