Taiwan Semiconductor Manufacturing Comp. Ltd.

Ming-Kai Lo

Chien Lin

Ching-Lun Lai

Yi-Chen Ho

Ju Ru Hsieh

Tzu-Wei Lin

An integrated circuit die includes a FinFET transistor. The FinFET transistor includes an anti-punch through region below a channel region. Undesirable dopants are removed from the anti-punch through region during formation of the source and drain regions. When source and drain recesses are formed, a layer of dielectric material is deposited in the recesses. An annealing process is then performed. Undesirable dopants diffuse from the anti-punch through region into the layer of dielectric material during the annealing process. The layer of dielectric material is then removed. The source and drain regions are then formed by depositing semiconductor material in the recesses.

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Hsinchu, Taiwan

Ming-Kai Lo