Taiwan Semiconductor Manufacturing Comp. Ltd.

Ming-Hui Lin

Chun-Sheng Wang

Yung-Min Cheng

Yao-Tung Liu

Shun-An Chen

Juei-Feng Hsu

Sheng-Guei Chang

Hsin-Hom Chen

Li-Chung Lin

A system for monitoring semiconductor testing tools comprises a tester testing a semiconductor device, whereby a test result is derived, a storage device storing a logic function corresponding to the semiconductor device, and a processor receiving the test result and the logic function from the tester and storage device respectively, and applying the logic function to the test result for validation.

System for validating and monitoring semiconductor testing tools

Within both an electrical test apparatus for electrically testing a substrate, and a method for electrically testing the substrate while employing the electrical test apparatus, there is provided for an automatic selection of an electrical test program, absent operator intervention, once having identified a substrate. Due to the absence of operator intervention, the substrate is more accurately electrically tested.

Microelectronic fabrication electrical test apparatus and method providing enhanced electrical test accuracy

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Kaohsiung, Taiwan

Ming-Hui Lin