Industrial Technology Research Institute

Ming-Hsiu Hsu

Pei-Fang Liang

Kai-Cheng Chang

Yi-Ru Chen

Guang-Chyeng Fang

Shih-Ping Lee

Chin-Chung Nien

Ming-Wei Chang

Gwo-Shiang Lee

Chen-Kai Hsu

Sung-Tao Lin

Han-Jou Li

Chia-Lin Fu

A diagnosis method of defects in a motor and a diagnosis device thereof are described. A vibration sensing module can generate a vibration signal corresponding to a vibration of a motor during operation of the motor. Then, a data pre-processing procedure is performed to eliminate noises of the vibration signal. After the data pre-processing procedure, an analyzing procedure is performed to determine a first harmonic of spectrum features in the spectrum of the pre-processed vibration signal. And, other spectrum feature(s) is(/are) retrieved from the spectrum of the pre-processed vibration signal according to the first harmonic. Finally, a comparison procedure is performed with a defect spectrum feature database according to the retrieved spectrum features, so as to determine a defect type of the motor.

Diagnosis method of defects in a motor and diagnosis device thereof

The invention is to provide a ring body and supporting structure of a vibratile gyroscope. The ring body is a thin sheet ring body having a height. The supporting structure is provided for supporting the ring body. The supporting structure is located on two opposing edges of the ring body. The supporting structures provide axial and radial supporting forces to restrain the ring body, providing better sensitivity and capability to resist environmental vibration and noise. Additionally, a reinforcing structure surrounding the ring body is arranged at an interior surface of the ring body to raise the rigidity of the ring body and maintain an elliptical resonance mode. If the reinforcing structure si arranged as high as the ring body, then it is possible to arrange electrodes at both inner and outer sides of the ring body to raise the effective area of driving and/or sensing electrodes. Raising the effective sensing area is further beneficial to reduce the needed driving voltage and increase the signal-to-noise ratio.

Ring body and supporting structure of vibratile gyroscope

An inertia device is constructed by both suspension structure and micro-electroplating structure. The suspension structure may be manufactured by surface micromachining technique of sacrificial layer process or bulk micromachining technique incorporating with thin film process. One side of the suspension structure is arranged firmly to a supporting piece, so that another side of the suspension structure is in a suspension state. The suspension side of the suspension structure is made as micro-electroplating structure through the micro-electroplating process and functions as inertia mass for an inertia sensor. The size of the micro-electroplating structure may be changed through the micro-electroplating process, such that the inertia sensor may be adapted for sensing in different levels. Furthermore, a microstructure of high aspect ratio may be achieved by taking the advantage of a metal during the selection of a processing material, such that the objective for lateral sensing or driving signal may be fulfilled.

Inertia sensor

The invention is to provide a vibratory double-axially sensing micro-gyroscope, which includes a base, on center of which a supporting hub is arranged, and plural suspending arms are extended outwardly with equal altitude and in radial direction from the supporting hub and, at the outside end of the suspending arm, a platform is formed, and a capacitance sensing electrode or a static-electricity driving electrode is plated respectively at each side of the platform top, below which a static-electricity driving electrode or a capacitance sensing electrode is arranged; take a preferred embodiment of the present invention for example, if the capacitance sensing electrode is arranged at top of the platform and the static-electricity driving electrode is arranged below the platform, then the suspending arm and the platform will vibrate vertically by the attraction of the static-electricity when applying driving voltage, and the vibratory phase difference between two adjacent suspending arms and the platform is 180 degrees; when the gyroscope is rotated horizontally, the suspending arm and the platform will generate horizontal displacement caused by Coriolis force and, by measuring the change of capacitance value, the magnitude of the angular velocity of vibration is obtained; since its structure has symmetrical property, so it has sensing ability in both X or Y axes and, because it has superior stability and is able to resist environment noise and vibration, its sensing capability is enhanced and, since its machining method is simple, so it is adapted for mass production for having lower manufacturing cost.

Vibratory double-axially sensing micro-gyroscope

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Nantou, Taiwan

Ming-Hsiu Hsu