Industrial Technology Research Institute

Ming-Hsin Liu

Tean-Mu Shen

Hong-Sheng Fang

Jiun-Hung Chen

Chun-Chien Chen

Jung-Chen Chien

Cheng-Chan Tsai

Chun-chien Chen

Jung-chen Chien

Ming-Te Hsiung

Jung-chen Chein

Ping-Chun Liu

An anode layer particle beam device includes a base, at least an anode placed on top of the base, an insulation layer set between the anode and the base, at least one magnetic pole, made of magnetic and conductive material and can be used as a cathode, an electric discharge channel, positioned between the anode and the magnetic pole, and an insulating material, placed in the electric discharge channel to serve as an insulator between the anode and the magnetic pole. The magnetic pole is positioned on top of the base and on an somewhat elevated outer periphery of the aforementioned anode (with the center of the later also as its center). An orifice is also set on the radiation path of the anode. Accordingly, a process gas stream can be directed into the electric discharge channel and, after being applied with a biased electric field, with the aide of the anode and the magnetic pole device, a particle beam can be generated and radiated out of the channel.

Anode layer particle beam device

A multi-stage vacuum pump includes a plurality of casings connected in series and each casing defining a respective compression chamber, a plurality of partition plates each set in between each two casings. When compressed by rotors at shafts in one compression chamber, compressed air passes through the air path formed in the corresponding partition plate to the next compression chamber for further compression, and finally compressed air passes to the last compression chamber through the air path formed in the last partition plate. Because the invention is designed to let compressed air directly pass through the air path in each partition plate, the outer diameter and volume of the multi-stage vacuum pump can be minimized to reduce the weight and the manufacturing cost.

Multi-stage vacuum pump

A combination double screw rotor assembly includes a first and a second screw rotor arranged in parallel in a casing, two sets of bearings respectively mounted in the casing near the outlet to support the shafts, and a plurality of locking means respectively fastened to the shafts near the inlet. The first and the second screw rotor each has a low pressure screw rotor element, a high pressure screw rotor element, and a spiral thread formed of a first spiral thread segment at the high pressure screw rotor element and a second spiral thread segment at the low pressure screw rotor element, the first spiral thread segment having an uniform short pitch, the second spiral thread segment having an uniform long pitch, the first spiral thread segment and second spiral thread segment of the first and the second screw rotor being respectively meshed together.

Combination double screw rotor assembly

A combination double screw rotor assembly includes a first screw rotor and a second screw rotor arranged in parallel in a casing, the first screw rotor and the second screw rotor each having a low pressure screw rotor element, a high pressure screw rotor element, and a spiral thread formed of a first spiral thread segment at the high pressure screw rotor element and a second spiral thread segment at the low pressure screw rotor element, the first spiral thread segment having an uniform short pitch, the second spiral thread segment having an uniform long pitch, the upper spiral thread segment and second spiral thread segment of the first screw rotor being respectively meshed with the first spiral thread segment and second spiral thread segment of the second screw rotor. During operation of the combination double screw rotor assembly, the flow of air moves from relatively greater air chambers around the low pressure screw rotor elements of the screw rotors toward the relatively smaller air chambers around the high pressure screw rotor elements of the screw rotors, and is compressed in the relatively smaller air chambers, preventing a reverse flow due to a significant pressure difference between the forwarding flow of air and the area around the outlet, so as to minimize power loss and operation noise.

An asymmetric double screw rotor assembly includes two asymmetric screw rotors respectively revolvably meshed together in a casing having an inlet and an outlet, the spiral threads of the screw rotors defining an uniform pitch, the outer diameter of the first screw rotor and the inner root diameter of the second rotor being uniform, the inner root diameter of the first screw rotor gradually increased from the inlet of the casing toward the outlet, the outer diameter of the second screw rotor gradually reduced from the inlet of the casing toward the outlet. Upon respective rotary motion of the screw rotors, the volume of the respective air chambers gradually reduces from the inlet of the casing toward the outlet.

Asymmetric double screw rotor assembly

A double screw rotor assembly includes two screw rotors meshed in a bushing inside a casing. The threads of the screw rotors have a uniform pitch, and define with the bushing a plurality of air chambers in the pitch. The volumes of the air chambers reduce gradually from the inlet toward the output due to the reduce of tooth high so that the outer diameter defined by the tooth tip of the thread of each screw rotor has the shape of an invertedly disposed cone. Adjustable spring means is provided to impart an axial spring force to the bushing relative to the casing, guide means is provided to guide axial movement of the bushing relative to the casing, and a O-ring is disposed between the top wall of the bushing and the casing. Adjusting the pre-loading of the spring means controls the dimension of the clearance between the inside wall of the bushing and the tooth tip of the thread of each screw rotor. The top wall of the busing forces the O-ring against the casing to maintain an airtight condition, so as to improve the working efficiency.

Double screw rotor assembly having means to automatically adjust the clearance by pressure difference

A double screw rotor assembly includes two screw rotors meshed in a bushing inside a casing. The threads of the screw rotors have a constant pitch, and define with the bushing a plurality of air chambers in the pitch. The volumes of the air chambers reduce gradually from the inlet toward the outlet due to reduced tooth height so that the outer diameter defined by the tooth tip of the thread of each screw rotor has the shape of an invertedly disposed cone. An electric driving device is controlled to move the bushing axially in the casing relative to the screw rotors in adjusting the clearance between the inside wall of the bushing and the tooth tip of the thread of each screw rotor, so as to minimize the consumption of starting power and facilitate stable running of the screw rotors, Further, a O-ring is provided at the top wall of the busing and pressed on the casing to keep an airtight status, so as to improve the working efficiency.

Growing community of inventors

Hsinchu, Taiwan

Ming-Hsin Liu