Qualcomm Mems Technologies, Inc.

Idc, LLC

Qualcomm Incorporated

Ming-Hau Tung

Clarence Chui

Lior Kogut

William J Cummings

Manish Kothari

Teruo Sasagawa

Brian James Gally

Mark W Miles

Brian W Arbuckle

Jeffrey Brian Sampsell

Yeh-Jiun Tung

John Batey

Philip Don Floyd

Denis H Endisch

Stephen Zee

Chih-Wei Chiang

Suryaprakash Ganti

Chun-Ming Wang

Wonsuk Chung

Alok Govil

Alan G Lewis

Jae Hyeong Seo

Surya Prakash Ganti

Srinivasan Sethuraman

Hsin-Fu Wang

Evgeni Petrovich Gousev

Marc Mignard

Russel A Martin

Robert L Holman

Cheonhong Kim

Bing Wen

Srinivasan Kodaganallur Ganapathi

Wilhelmus Johannes Robertus Van Lier

Kristopher Andrew Lavery

Edward Keat Leem Chan

Xiaoming Yan

Rihui He

Gregory David U'Ren

Chengbin Qiu

Chih-Hsiang Ho

This disclosure provides systems, methods and apparatus for provided masked structures on an embossed substrate. In one aspect, these masked structures may be reflected facets for use as part of a frontlight film. In another aspect, these masked structures may be masked wiring for use as part of a capacitive touchscreen array. In one aspect, the structures may have a discrete mask formed thereon, while in other aspects, these structures may have self-masking attributes, and may include an interferometric black mask.

Angled facets for display devices

Display elements of a display array include at least one fixed layer and a movable layer. The movable layer is positioned with respect to the at least one fixed layer by placing a charge on the movable layer and applying a voltage to the at least one fixed layer. The at least one fixed layer may be two layers positioned on either side of the movable layer. The movable layer may be positioned in a desired position when driving an array of display elements by executing a reset stage, a charging stage, and a bias stage.

Systems, devices, and methods for driving an analog interferometric modulator

This disclosure provides systems, methods and apparatus for an arrangement of pixels and interconnects in a display. In one aspect, polarities of pixels may be in a dot inversion configuration, or checkerboard pattern, to reduce the visibility of flicker. Various interconnect alternatively couple between modules in different columns or rows to provide dot inversion.

Dot inversion configuration

This disclosure provides systems, methods and apparatus for masked reflective structures which can be integrated into display devices. In one aspect, masks and etch leading layers can be used to control the etching of a stack of layers to form masked reflective structures having a desired profile. In particular, tapered edges at a particular angle can be formed, and the resulting structures used in a roll-to-roll process to fabricate a device component.

Vertically etched facets for display devices

A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.

Spatial light modulator with integrated optical compensation structure

A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Electromechanical device with optical function separated from mechanical and electrical function

Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

Method of manufacturing MEMS devices providing air gap control

Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, both rivets and posts may be used. In certain embodiments, these support structures are formed from rigid inorganic materials, such as metals or oxides. In certain embodiments, etch barriers may also be deposited to facilitate the use of materials in the formation of support structures which are not selectively etchable with respect to other components within the MEMS device.

Electromechanical devices having support structures

Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.

MEMS devices with multi-component sacrificial layers

In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.

Controlling electromechanical behavior of structures within a microelectromechanical systems device

Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

MEMS devices having overlying support structures

An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.

System and method for micro-electromechanical operation of an interferometric modulator

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San Francisco, CA, United States of America

Ming-Hau Tung