Taiwan Semiconductor Manufacturing Comp. Ltd.

Ming-Feng Ou

Gwo-Chiang Fang

Ju-Kau Chen

Chao-Fan Chang

Oliver Wu

Pai-Cheng Huang

Wen-Pin Wu

Computer-implemented wafer-based planning methods for batch-based processing tools. Tool groups are appended in a tool group level of planning data provided by a MES for converting planning data from batch-based to wafer-based data. The planning data with appended tool group is applied to dispatch processing tools.

Wafer-based planning methods and systems for batch-based processing tools

A method is provided for product culmination estimation in a microelectronics manufacturing environment. The method includes providing a manufacturing executing system including a plurality of processing entities. The manufacturing executing system provides interconnectivity and management of the processing entities. The method also assigns a standard queue time factor to product advancing through the manufacturing executing system, and determines an actual and theoretical cycle time and associated with the product through each process entity of the manufacturing executing system. The method further includes anticipating a target queue time for the product through the manufacturing executing system, and forecasting product cycle time of the product through the manufacturing executing system.

Method for target queue time calculation in semiconductor manufacturing planning

A system for manufacturing scheduling for a fabrication system. The fabrication contains a plurality of tool groups, and each of which has at least one tool. The system contains an input/output device, a processor, and a storage device. The processor calculates the tool group count of each tool, and assigns a preference index to each tool accordingly, then derives a preference-based manufacturing schedule.

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Hsinchu, Taiwan

Ming-Feng Ou