Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan

Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan, R.o.c

Ming-Chung Yang

Cheng-Chang Hsieh

Deng-Lain Lin

Hsin-Liang Chen

Chi-Fong Ai

Ching-Pei Tseng

Yan-Zheng Du

A high frequency plasma apparatus includes a reaction chamber, a first electrode, a second electrode, and a plurality of feed points located at one of the two electrodes at least. The feed points are used to simultaneously generate a first standing wave and a second standing wave, with different temporal and spatial patterns. By adjusting amplitudes of the two standing waves and the temporal and spatial phase differences between the two standing waves appropriately, plasma uniformity of the high frequency plasma apparatus can be effectively improved.

Apparatus of high frequency plasma

A large-area plasma generating apparatus is disclosed, which includes a reaction chamber; a first electrode disposed in the reaction chamber; a second electrode parallel with the first electrode and disposed in the reaction chamber; and a discharge region formed between the first and second electrodes and a plasma can be formed therein; wherein a travelling wave or a traveling-wave-like electromagnetic field is generated via at least one of the first and second electrodes and travels from one end of the discharge region to its opposite end, so as to uniform the plasma in the discharge region.

Large-area plasma generating apparatus

Growing community of inventors

Taoyuan, Taiwan

Ming-Chung Yang