United Microelectronics Corp.

Winbond Electronics Corporation

Ming-Che Yang

Kuo-Feng Huang

En-Tien Tan

Kuei-Hsi Lai

Eric Liu

Hsien-Jung Hsu

Ching-Chih Cheng

Kuo-Chen Wang

Sheng-Tsai Chang

You-Jan Lin

Kun-Ying Lo

Hung-Lung Mar

A multi-level pulse width modulation (MPWM) digital-to-analog converter for receiving a n-bit pulse code modulation (PCM) signal and then outputting a m-level analog signal is provided. The MPWM DAC comprises a converter circuit, 2first output drivers, 2second output drivers and a control circuit. The converter circuit is used for converting (n-m) most significant bits (MSB) of the n-bit PWM signal into a PWM waveform, and then generating a first input signal and a second input signal. Each of the 2first output drivers is used for receiving the first input signal, and then generating a first output current, wherein the first output currents of the 2first output drivers can be equal or not. Each of the 2second output drivers is used for receiving the second input signal, and then generating a second output current, wherein the second output currents of the 2first output drivers can be equal or not. The control circuit is coupled to the converter circuit, 2first output drivers, and 2second output drivers, for controlling the on-off status of each of the first and the second output drivers.

Device and control structure of multi-level pulse width modulation

A supply apparatus comprises a storage tank, a chemical flow pipe to route a chemical solution into a semiconductor processing room, a pressurizing apparatus to supply gas to the storage tank to make the chemical solution flow into the processing room, and an electro-Pneumatic regulator valve to adjust the pressure of the input gas. The flow control device comprises a flow sensor, a set-up apparatus, and a processor for generating a control signal to the pressurizing apparatus depending on a difference between a target value and a measurement value to adjust the flow of the chemical solution in the chemical flow pipe. The flow sensor comprises a hollow cylinder, a choking magnetic core movably positioned inside the hollow cylinder, and a first and second conductive coil wrapped around the outer wall of the hollow cylinder which uses alternating current to generate a magnetic flux and sense a change in the magnetic flux to measure the flow of chemical solution.

Flow control device

A spray coating device for coating a rotating wafer according to the invention is disclosed. The spray coating device comprises a spray head having a plurality of spray holes which are located on one end thereof with more in number on both sides than on the center of the end for uniformly spraying a chemical liquid on the rotated wafer. Since spray holes are more in number on the both sides than on the center of the end, the rotated wafer can be uniformly spray coated with the chemical liquid even though several spray holes are congested.

Spray coating device

A dispensing system used in a spin coater is provided to transport a solvent to a wafer. The dispensing, system includes a switch valve, a sucking-back valve, a solenoid valve, a speed control unit of the sucking-back valve, and a speed control unit of the switch valve. The switch valve controls a solvent dispensing status. The sucking-back valve receives the solvent from the switch valve and exports the solvent to a wafer. The solenoid valve controls the switch valve and the sucking-back valve. The speed control unit of the switch valve is coupled between the switch valve and the solenoid valve and is used for a control of action speed on the switch valve. The speed control unit of the sucking-back valve is coupled between the switch valve and the sucking-back valve, and is used for a control of action speed of the sucking-back valve by a sufficient delay time of action.

Dispensing system of a coater

A photoresist dispensing system used in a photoresist coating machine includes a pump, a sucking-back valve, a solenoid valve, a first pump speed controller, a second pump speed controller and a sucking-back speed controller. The pump is used to transport photoresist and spray a substrate. The sucking-back valve is used to suck back liquid photoresist from a transporting duct end. The solenoid is used to activate or inactivate the pump and the sucking-back valve. The first and the second pump speed controllers are separately coupled between the pump and the solenoid valve, and the sucking-back speed controller is coupled between the sucking-back valve and the sucking-back speed controller is coupled between the sucking-back valve and the route, where is between the pump and the second pump speed controller. Hence, the sucking-back valve produces a sucking force after the pump is inactivated and releases a sucking force after pump is activated.

Dispense system of a photoresist coating machine

A SOG coater nozzle pot includes a pot for containing fluid and letting the fluid in the pot flow out, a funneled nozzle including a wider opening for receiving fluid from the pot and a narrower opening on a protuberance inserted into a duct, and a mounting device for mounting the funneled nozzle on the SOG coater. The nozzle pot according to the invention makes the mounting/dismounting operations of the pot more convenient and less time-consuming. The stability of the SOG coater is maintained as well.

SOG coater nozzle pot

An improved method for forming a timbre sample (Q sample) is described. A first Q sample is extracted. A fixed length of the first Q sample is extracted to form a first QL. A portion of the first Q sample other than the first QL is treated as a first pre-waveform. A last portion of the first pre-waveform is extracted and is processed with the second Q sample by a first COS modulation so as to obtain a second QL, which is connected to the first pre-waveform to form a second Q sample. A first period waveform of the second QL and a last portion of the first pre-waveform are processed by a second COS modulation to form a single period QL. Repeating the single period QL forms a third QL. Connecting the third QL to the first pre-waveform forms a third Q sample. The second QL is transformed by a digital Fourier transformation, and its high frequency modes are removed. The transformed second QL is inversely transformed back by an inverse digital Fourier transformation to form a fourth QL. Adding the third QL and the fourth QL forms a fifth WL sample, which power is properly normalized. A second pre-waveform is obtained by repeating the sixth QL. The first and second of pre-waveforms are processed by a linear cross fading algorithm to form a third pre-waveform. The third pre-waveform and the sixth QL are connected together to obtain an improved Q sample.

Growing community of inventors

Kaohsiung, Taiwan

Ming-Che Yang