Delta Electronics, Inc.

Uwiz Technology Co., Ltd.

Ming-Che Ho

Song-Yuan Chang

Chun-Chen Chen

Yun-Lung Ho

Ming-Hui Lu

Chung-Wei Chiang

Wen-Shan Chuans

Ming-hui Lu

Chia-Hua Wang

Provided is a slurry composition including abrasive particles, halogen oxide, and nitroxide compound. The combination of halogen oxide and nitroxide compound has a synergistic effect to remove a substrate containing tungsten and silicon oxide. Moreover, a use of the slurry composition and a polishing method using the slurry composition are provided.

Method of selectively removing tungsten over silicon oxide

A polishing composition of the present invention at least comprises about 750 ppm to less than 5000 ppm by weight of abrasive particles, hydrogen peroxide, an accelerator, a dual-corrosion inhibitor and water, wherein the dual-corrosion inhibitor contains a first and a second corrosion inhibitor. The dual-corrosion inhibitor is applied to the planarization of metal layers so as to maintain a high removal rate of metal layers as well as suppress etching of the metal, thus capable of reducing polishing defects such as dishing, erosion and the like.

Polishing composition for planarizing metal layer

A power-transforming device including a power-transforming body for transforming an input power into a transformed power and an output port extractably mounted in the power-transforming body for outputting the transformed power is provided. Because the electric wires and plugs of the power-transforming device can be extracted from the power-transforming body and be collected separately, the power-transforming device is very convenient to be carried and used.

Power-transforming device

An apparatus is adapted to be disposed between a heating element and a housing for evenly dissipating heat generated by the heating element. The apparatus includes a first thermal conductor having a first part contacted with the heating element for absorbing the generated heat from the heating element, and having a second part, and a second thermal conductor having a first part with a relatively low thermal conductivity to contact with the first part of the first thermal conductor and a second part with a relatively high thermal conductivity to contact with the second part of the first thermal conductor for transferring the heat from the first thermal conductor to the housing.

Growing community of inventors

Taoyuan, Taiwan

Ming-Che Ho